X-ray photoelectron spectroscopy study of Schottky junctions based on oxygen-/fluorine-terminated (100) diamond

Fengnan Li; Jingwen Zhang; Xiaoliang Wang; Zhangcheng Liu; Wei Wang; Shuoye Li; Hong Xing Wang

doi:10.1016/j.diamond.2015.12.007

X-ray photoelectron spectroscopy study of Schottky junctions based on oxygen-/fluorine-terminated (100) diamond

Fengnan Li
, Jingwen Zhang
, Xiaoliang Wang
, Zhangcheng Liu
, Wei Wang
, Shuoye Li
, Hong Xing Wang

电子与信息学部

Xi'an Jiaotong University

科研成果: 期刊稿件 › 文章 › 同行评审

21 引用（Scopus）

摘要

In this study, investigation of Schottky junctions based on oxygen-/fluorine-terminated (100) diamond (O-/F-diamond) film has been carried out. Both of the O-/F-diamond surfaces have been formed on different areas of one (100) diamond sample by O₂ and CF₄ plasma. Metals of Au, Pd, and Cu have been evaporated on the diamond surfaces to form Schottky junctions, whose barrier heights on O-/F-diamond have been investigated by X-ray photoelectron spectroscopy technique, the results of which indicate that the barrier heights of the metals on O-diamond are about 1.70 eV, and those on F-diamond are about 2.30 eV, respectively.

源语言	英语
页（从-至）	180-185
页数	6
期刊	Diamond and Related Materials
卷	63
DOI	https://doi.org/10.1016/j.diamond.2015.12.007
出版状态	已出版 - 1 3月 2016

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10.1016/j.diamond.2015.12.007

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@article{26ba0ae635a145808a364bf6983902bb,

title = "X-ray photoelectron spectroscopy study of Schottky junctions based on oxygen-/fluorine-terminated (100) diamond",

abstract = "In this study, investigation of Schottky junctions based on oxygen-/fluorine-terminated (100) diamond (O-/F-diamond) film has been carried out. Both of the O-/F-diamond surfaces have been formed on different areas of one (100) diamond sample by O2 and CF4 plasma. Metals of Au, Pd, and Cu have been evaporated on the diamond surfaces to form Schottky junctions, whose barrier heights on O-/F-diamond have been investigated by X-ray photoelectron spectroscopy technique, the results of which indicate that the barrier heights of the metals on O-diamond are about 1.70 eV, and those on F-diamond are about 2.30 eV, respectively.",

keywords = "CVD diamond, Fluorine-terminated, Schottky junctions, XPS",

author = "Fengnan Li and Jingwen Zhang and Xiaoliang Wang and Zhangcheng Liu and Wei Wang and Shuoye Li and Wang, \{Hong Xing\}",

year = "2016",

month = mar,

day = "1",

doi = "10.1016/j.diamond.2015.12.007",

language = "英语",

volume = "63",

pages = "180--185",

journal = "Diamond and Related Materials",

issn = "0925-9635",

publisher = "Elsevier B.V.",

}

TY - JOUR

T1 - X-ray photoelectron spectroscopy study of Schottky junctions based on oxygen-/fluorine-terminated (100) diamond

AU - Li, Fengnan

AU - Zhang, Jingwen

AU - Wang, Xiaoliang

AU - Liu, Zhangcheng

AU - Wang, Wei

AU - Li, Shuoye

AU - Wang, Hong Xing

PY - 2016/3/1

Y1 - 2016/3/1

N2 - In this study, investigation of Schottky junctions based on oxygen-/fluorine-terminated (100) diamond (O-/F-diamond) film has been carried out. Both of the O-/F-diamond surfaces have been formed on different areas of one (100) diamond sample by O2 and CF4 plasma. Metals of Au, Pd, and Cu have been evaporated on the diamond surfaces to form Schottky junctions, whose barrier heights on O-/F-diamond have been investigated by X-ray photoelectron spectroscopy technique, the results of which indicate that the barrier heights of the metals on O-diamond are about 1.70 eV, and those on F-diamond are about 2.30 eV, respectively.

AB - In this study, investigation of Schottky junctions based on oxygen-/fluorine-terminated (100) diamond (O-/F-diamond) film has been carried out. Both of the O-/F-diamond surfaces have been formed on different areas of one (100) diamond sample by O2 and CF4 plasma. Metals of Au, Pd, and Cu have been evaporated on the diamond surfaces to form Schottky junctions, whose barrier heights on O-/F-diamond have been investigated by X-ray photoelectron spectroscopy technique, the results of which indicate that the barrier heights of the metals on O-diamond are about 1.70 eV, and those on F-diamond are about 2.30 eV, respectively.

KW - CVD diamond

KW - Fluorine-terminated

KW - Schottky junctions

KW - XPS

UR - https://www.scopus.com/pages/publications/84959192496

U2 - 10.1016/j.diamond.2015.12.007

DO - 10.1016/j.diamond.2015.12.007

M3 - 文章

AN - SCOPUS:84959192496

SN - 0925-9635

VL - 63

SP - 180

EP - 185

JO - Diamond and Related Materials

JF - Diamond and Related Materials

ER -

X-ray photoelectron spectroscopy study of Schottky junctions based on oxygen-/fluorine-terminated (100) diamond

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