X-ray imaging test for a single-stage MEMS X-ray optical system

Ikuyuki Mitsuishi; Yuichiro Ezoe; Kensuke Ishizu; Teppei Moriyama; Yoshitomo Maeda; Takayuki Hayashi; Takuro Sato; Makoto Mita; N. Y. Yamasaki; K. Mitsuda; Mitsuhiro Horade; Susumu Sugiyama; Raul E. Riveros; Taylor Boggs; Hitomi Yamaguchi; Yoshiaki Kanamori; Kohei Morishita; Kazuo Nakajima; Ryutaro Maeda

doi:10.1109/OMEMS.2010.5672138

X-ray imaging test for a single-stage MEMS X-ray optical system

Ikuyuki Mitsuishi
, Yuichiro Ezoe
, Kensuke Ishizu
, Teppei Moriyama
, Yoshitomo Maeda
, Takayuki Hayashi
, Takuro Sato
, Makoto Mita
, N. Y. Yamasaki
, K. Mitsuda
, Mitsuhiro Horade
, Susumu Sugiyama
, Raul E. Riveros
, Taylor Boggs
, Hitomi Yamaguchi
, Yoshiaki Kanamori
, Kohei Morishita
, Kazuo Nakajima
, Ryutaro Maeda

JAXA Institute of Space and Astronautical Science
Tokyo Metropolitan University
Ritsumeikan University
University of Florida
Tohoku University
Kyoto University
National Institute of Advanced Industrial Science and Technology

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

摘要

An X-ray imaging test for an X-ray optical system based on MEMS technologies was conducted at the ISAS 30 m beamline. An X-ray reflection and focusing were successfully verified at Al K_α 1.49 keV for the first time. The image quality estimated as a half power diameter was ∼20 arcmin. This was consistent with the angular resolution estimated from the surface roughness of 200 nm rms at 100 ìm scale. In this paper, the experimental setup and the result of X-ray imaging analysis are reported.

源语言	英语
主期刊名	2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010
页	151-152
页数	2
DOI	https://doi.org/10.1109/OMEMS.2010.5672138
出版状态	已出版 - 2010
已对外发布	是
活动	2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010 - Sapporo, 日本期限: 9 8月 2010 → 12 8月 2010

出版系列

姓名	2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010

会议

会议	2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010
国家/地区	日本
市	Sapporo
时期	9/08/10 → 12/08/10

访问文件

10.1109/OMEMS.2010.5672138

其它文件与链接

链接到 Scopus 的出版物

引用此

Mitsuishi, I., Ezoe, Y., Ishizu, K., Moriyama, T., Maeda, Y., Hayashi, T., Sato, T., Mita, M., Yamasaki, N. Y., Mitsuda, K., Horade, M., Sugiyama, S., Riveros, R. E., Boggs, T., Yamaguchi, H., Kanamori, Y., Morishita, K., Nakajima, K., & Maeda, R. (2010). X-ray imaging test for a single-stage MEMS X-ray optical system. 在 2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010 (页码 151-152). 文章 5672138 (2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010). https://doi.org/10.1109/OMEMS.2010.5672138

@inproceedings{b02559babb51465cb7197c03566ab570,

title = "X-ray imaging test for a single-stage MEMS X-ray optical system",

abstract = "An X-ray imaging test for an X-ray optical system based on MEMS technologies was conducted at the ISAS 30 m beamline. An X-ray reflection and focusing were successfully verified at Al Kα 1.49 keV for the first time. The image quality estimated as a half power diameter was ∼20 arcmin. This was consistent with the angular resolution estimated from the surface roughness of 200 nm rms at 100 {\`i}m scale. In this paper, the experimental setup and the result of X-ray imaging analysis are reported.",

author = "Ikuyuki Mitsuishi and Yuichiro Ezoe and Kensuke Ishizu and Teppei Moriyama and Yoshitomo Maeda and Takayuki Hayashi and Takuro Sato and Makoto Mita and Yamasaki, \{N. Y.\} and K. Mitsuda and Mitsuhiro Horade and Susumu Sugiyama and Riveros, \{Raul E.\} and Taylor Boggs and Hitomi Yamaguchi and Yoshiaki Kanamori and Kohei Morishita and Kazuo Nakajima and Ryutaro Maeda",

year = "2010",

doi = "10.1109/OMEMS.2010.5672138",

language = "英语",

isbn = "9781424489251",

series = "2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010",

pages = "151--152",

booktitle = "2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010",

note = "2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010 ; Conference date: 09-08-2010 Through 12-08-2010",

}

Mitsuishi, I, Ezoe, Y, Ishizu, K, Moriyama, T, Maeda, Y, Hayashi, T, Sato, T, Mita, M, Yamasaki, NY, Mitsuda, K, Horade, M, Sugiyama, S, Riveros, RE, Boggs, T, Yamaguchi, H, Kanamori, Y, Morishita, K, Nakajima, K & Maeda, R 2010, X-ray imaging test for a single-stage MEMS X-ray optical system. 在 2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010., 5672138, 2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010, 页码 151-152, 2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010, Sapporo, 日本, 9/08/10. https://doi.org/10.1109/OMEMS.2010.5672138

X-ray imaging test for a single-stage MEMS X-ray optical system. / Mitsuishi, Ikuyuki; Ezoe, Yuichiro; Ishizu, Kensuke 等.
2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010. 2010. 页码 151-152 5672138 (2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010).

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

TY - GEN

T1 - X-ray imaging test for a single-stage MEMS X-ray optical system

AU - Mitsuishi, Ikuyuki

AU - Ezoe, Yuichiro

AU - Ishizu, Kensuke

AU - Moriyama, Teppei

AU - Maeda, Yoshitomo

AU - Hayashi, Takayuki

AU - Sato, Takuro

AU - Mita, Makoto

AU - Yamasaki, N. Y.

AU - Mitsuda, K.

AU - Horade, Mitsuhiro

AU - Sugiyama, Susumu

AU - Riveros, Raul E.

AU - Boggs, Taylor

AU - Yamaguchi, Hitomi

AU - Kanamori, Yoshiaki

AU - Morishita, Kohei

AU - Nakajima, Kazuo

AU - Maeda, Ryutaro

PY - 2010

Y1 - 2010

N2 - An X-ray imaging test for an X-ray optical system based on MEMS technologies was conducted at the ISAS 30 m beamline. An X-ray reflection and focusing were successfully verified at Al Kα 1.49 keV for the first time. The image quality estimated as a half power diameter was ∼20 arcmin. This was consistent with the angular resolution estimated from the surface roughness of 200 nm rms at 100 ìm scale. In this paper, the experimental setup and the result of X-ray imaging analysis are reported.

AB - An X-ray imaging test for an X-ray optical system based on MEMS technologies was conducted at the ISAS 30 m beamline. An X-ray reflection and focusing were successfully verified at Al Kα 1.49 keV for the first time. The image quality estimated as a half power diameter was ∼20 arcmin. This was consistent with the angular resolution estimated from the surface roughness of 200 nm rms at 100 ìm scale. In this paper, the experimental setup and the result of X-ray imaging analysis are reported.

UR - https://www.scopus.com/pages/publications/78751519875

U2 - 10.1109/OMEMS.2010.5672138

DO - 10.1109/OMEMS.2010.5672138

M3 - 会议稿件

AN - SCOPUS:78751519875

SN - 9781424489251

T3 - 2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010

SP - 151

EP - 152

BT - 2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010

T2 - 2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010

Y2 - 9 August 2010 through 12 August 2010

ER -

Mitsuishi I, Ezoe Y, Ishizu K, Moriyama T, Maeda Y, Hayashi T 等. X-ray imaging test for a single-stage MEMS X-ray optical system. 在 2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010. 2010. 页码 151-152. 5672138. (2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010). doi: 10.1109/OMEMS.2010.5672138

X-ray imaging test for a single-stage MEMS X-ray optical system

摘要

出版系列

会议

访问文件

其它文件与链接

学术指纹

引用此