Uniformity of ZnS bulk materials prepared by chemical vapor deposition

Yong Han; Xiulin Zheng; Zhengtang Liu

Uniformity of ZnS bulk materials prepared by chemical vapor deposition

Yong Han
, Xiulin Zheng
, Zhengtang Liu

Northwestern Polytechnical University Xian

科研成果: 期刊稿件 › 文章 › 同行评审

摘要

The ZnS bulk materials have been prepared by the chemical vapor deposition from H₂S and Zn. The effect of deposition temperature, pressure and flow volume of H₂S, Zn vapor and Ar on the thickness uniformity of ZnS was studied, and the ways of improving the thickness uniformity of ZnS and avoiding the nodular growth of ZnS on deposition surface were put forward.

源语言	英语
页（从-至）	25-27
页数	3
期刊	Cailiao Gongcheng/Journal of Materials Engineering
期	12
出版状态	已出版 - 12月 1996
已对外发布	是

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title = "Uniformity of ZnS bulk materials prepared by chemical vapor deposition",

abstract = "The ZnS bulk materials have been prepared by the chemical vapor deposition from H2S and Zn. The effect of deposition temperature, pressure and flow volume of H2S, Zn vapor and Ar on the thickness uniformity of ZnS was studied, and the ways of improving the thickness uniformity of ZnS and avoiding the nodular growth of ZnS on deposition surface were put forward.",

author = "Yong Han and Xiulin Zheng and Zhengtang Liu",

year = "1996",

month = dec,

language = "英语",

pages = "25--27",

journal = "Cailiao Gongcheng/Journal of Materials Engineering",

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TY - JOUR

T1 - Uniformity of ZnS bulk materials prepared by chemical vapor deposition

AU - Han, Yong

AU - Zheng, Xiulin

AU - Liu, Zhengtang

PY - 1996/12

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N2 - The ZnS bulk materials have been prepared by the chemical vapor deposition from H2S and Zn. The effect of deposition temperature, pressure and flow volume of H2S, Zn vapor and Ar on the thickness uniformity of ZnS was studied, and the ways of improving the thickness uniformity of ZnS and avoiding the nodular growth of ZnS on deposition surface were put forward.

AB - The ZnS bulk materials have been prepared by the chemical vapor deposition from H2S and Zn. The effect of deposition temperature, pressure and flow volume of H2S, Zn vapor and Ar on the thickness uniformity of ZnS was studied, and the ways of improving the thickness uniformity of ZnS and avoiding the nodular growth of ZnS on deposition surface were put forward.

UR - https://www.scopus.com/pages/publications/0030365994

M3 - 文章

AN - SCOPUS:0030365994

SN - 1001-4381

SP - 25

EP - 27

JO - Cailiao Gongcheng/Journal of Materials Engineering

JF - Cailiao Gongcheng/Journal of Materials Engineering

IS - 12

ER -

Uniformity of ZnS bulk materials prepared by chemical vapor deposition

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