TY - JOUR
T1 - Ultrahigh carrier mobility in an amorphous-carbon-adsorbed diamond conductive channel
AU - Zhao, Shangman
AU - Ye, Sheng
AU - Zhao, Zichen
AU - Liu, Jinlong
AU - Chen, Liangxian
AU - Wei, Junjun
AU - Li, Chengming
AU - Ouyang, Xiaoping
N1 - Publisher Copyright:
© 2026 Elsevier B.V. All rights are reserved, including those for text and data mining, AI training, and similar technologies.
PY - 2026/3
Y1 - 2026/3
N2 - Hydrogen-terminated diamond (H-diamond) has emerged as a promising dopant-free p-type semiconductor owing to its distinctive surface conductivity. However, the development of H-diamond-based electronic devices remain constrained by their limited carrier mobility and poor environmental stability. In this work, we developed an innovative approach through conformal deposition of an amorphous carbon (a-C) layer on H-diamond surfaces via microwave plasma chemical vapor deposition. This engineered interface establishes a highly conductive channel exhibiting an unprecedented hole mobility exceeding 1470 cm2V−1 s−1, while maintaining optimal carrier density (∼1012 cm−2) and remarkably low sheet resistance (2300 Ω/□). The modified surface demonstrates exceptional environmental stability, retaining its electrical properties for over two months under ambient conditions while maintaining excellent conductivity at elevated temperatures up to 575 K. Comprehensive characterization through photoluminescence spectroscopy, ultraviolet photoelectron spectroscopy, and comparative vacuum/ambient Hall measurements reveals a charge transfer doping mechanism predominantly mediated by the adsorbed a-C layer, with secondary contributions from ambient molecular species. This breakthrough provides critical insights for designing stable, high-performance H-diamond-based electronic systems for advanced applications in extreme environments.
AB - Hydrogen-terminated diamond (H-diamond) has emerged as a promising dopant-free p-type semiconductor owing to its distinctive surface conductivity. However, the development of H-diamond-based electronic devices remain constrained by their limited carrier mobility and poor environmental stability. In this work, we developed an innovative approach through conformal deposition of an amorphous carbon (a-C) layer on H-diamond surfaces via microwave plasma chemical vapor deposition. This engineered interface establishes a highly conductive channel exhibiting an unprecedented hole mobility exceeding 1470 cm2V−1 s−1, while maintaining optimal carrier density (∼1012 cm−2) and remarkably low sheet resistance (2300 Ω/□). The modified surface demonstrates exceptional environmental stability, retaining its electrical properties for over two months under ambient conditions while maintaining excellent conductivity at elevated temperatures up to 575 K. Comprehensive characterization through photoluminescence spectroscopy, ultraviolet photoelectron spectroscopy, and comparative vacuum/ambient Hall measurements reveals a charge transfer doping mechanism predominantly mediated by the adsorbed a-C layer, with secondary contributions from ambient molecular species. This breakthrough provides critical insights for designing stable, high-performance H-diamond-based electronic systems for advanced applications in extreme environments.
KW - Amorphous carbon
KW - Carrier mobility
KW - Electrical stability
KW - Hydrogen terminated diamond
UR - https://www.scopus.com/pages/publications/105030654986
U2 - 10.1016/j.diamond.2026.113418
DO - 10.1016/j.diamond.2026.113418
M3 - 文章
AN - SCOPUS:105030654986
SN - 0925-9635
VL - 163
JO - Diamond and Related Materials
JF - Diamond and Related Materials
M1 - 113418
ER -