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Ultrahigh carrier mobility in an amorphous-carbon-adsorbed diamond conductive channel

  • Shangman Zhao
  • , Sheng Ye
  • , Zichen Zhao
  • , Jinlong Liu
  • , Liangxian Chen
  • , Junjun Wei
  • , Chengming Li
  • , Xiaoping Ouyang
  • University of Science and Technology Beijing
  • XiangTan University

科研成果: 期刊稿件文章同行评审

摘要

Hydrogen-terminated diamond (H-diamond) has emerged as a promising dopant-free p-type semiconductor owing to its distinctive surface conductivity. However, the development of H-diamond-based electronic devices remain constrained by their limited carrier mobility and poor environmental stability. In this work, we developed an innovative approach through conformal deposition of an amorphous carbon (a-C) layer on H-diamond surfaces via microwave plasma chemical vapor deposition. This engineered interface establishes a highly conductive channel exhibiting an unprecedented hole mobility exceeding 1470 cm2V−1 s−1, while maintaining optimal carrier density (∼1012 cm−2) and remarkably low sheet resistance (2300 Ω/□). The modified surface demonstrates exceptional environmental stability, retaining its electrical properties for over two months under ambient conditions while maintaining excellent conductivity at elevated temperatures up to 575 K. Comprehensive characterization through photoluminescence spectroscopy, ultraviolet photoelectron spectroscopy, and comparative vacuum/ambient Hall measurements reveals a charge transfer doping mechanism predominantly mediated by the adsorbed a-C layer, with secondary contributions from ambient molecular species. This breakthrough provides critical insights for designing stable, high-performance H-diamond-based electronic systems for advanced applications in extreme environments.

源语言英语
文章编号113418
期刊Diamond and Related Materials
163
DOI
出版状态已出版 - 3月 2026
已对外发布

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