Tunable optical microscanner driven by piezoelectric actuator

In this study, we developed a tunable piezoelectric optical microscanner. The characteristic of the present microscanner is that the Pb(Zr,Ti)O ₃ film is formed on the torsion hinges of the scanner and the hinges act as a tuner themselves. DC voltage applied to the tuner varies the resonant frequency of the rotation of the mirror. A laser displacement meter measures the resonant frequencies to be 6457 Hz for no tuning and 6471 Hz for 15 V tuning. The resonant frequency with tuning between 0 and 15 V shows a hysteresis curve. Moreover, tuning between -15 and 15 V results in the butterfly curve of resonant frequency. The scanning angle under resonant actuation at 6457 Hz is decreased from 5.6 to 5.0° by applying a DC voltage of 15 V to the tuner. The result is in good agreement with the displacement of the edge of the mirror measured using the laser displacement meter.