Tip-scanning dynamic force microscope using piezoelectric cantilever for full wafer inspection

Jiaru Chu; Ryutaro Maeda; Toshihiro Itoh; Tadatomo Suga

doi:10.1143/jjap.38.7155

Tip-scanning dynamic force microscope using piezoelectric cantilever for full wafer inspection

Jiaru Chu
, Ryutaro Maeda
, Toshihiro Itoh
, Tadatomo Suga

National Institute of Advanced Industrial Science and Technology
R and D Inst. for Photonics Eng.
The University of Tokyo

科研成果: 期刊稿件 › 文章 › 同行评审

10 引用（Scopus）

摘要

In this study we demonstrate the structure of a new dynamic force microscope (DFM) compatible with full wafer inspection. It is a tip-scanning-type DFM based on a piezoelectric micro-cantilever integrated with a conical tip as a force sensor. The piezoelectric micro-force sensor is mounted on top of a tube scanner. The sample is put on the sample stage facing the tip. The novel DFM has proven to be stable for probing the surface of full wafers with a vertical resolution of about 0.12 nm. The design and performance of the novel tip scanning DFM is explained in detail in this report.

源语言	英语
页（从-至）	7155-7158
页数	4
期刊	Japanese Journal of Applied Physics
卷	38
期	12 B
DOI	https://doi.org/10.1143/jjap.38.7155
出版状态	已出版 - 1999
已对外发布	是

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abstract = "In this study we demonstrate the structure of a new dynamic force microscope (DFM) compatible with full wafer inspection. It is a tip-scanning-type DFM based on a piezoelectric micro-cantilever integrated with a conical tip as a force sensor. The piezoelectric micro-force sensor is mounted on top of a tube scanner. The sample is put on the sample stage facing the tip. The novel DFM has proven to be stable for probing the surface of full wafers with a vertical resolution of about 0.12 nm. The design and performance of the novel tip scanning DFM is explained in detail in this report.",

keywords = "Actuator, DFM, Micro-force sensor, Piezoelectric, Sol-gel",

author = "Jiaru Chu and Ryutaro Maeda and Toshihiro Itoh and Tadatomo Suga",

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AU - Chu, Jiaru

AU - Maeda, Ryutaro

AU - Itoh, Toshihiro

AU - Suga, Tadatomo

PY - 1999

Y1 - 1999

N2 - In this study we demonstrate the structure of a new dynamic force microscope (DFM) compatible with full wafer inspection. It is a tip-scanning-type DFM based on a piezoelectric micro-cantilever integrated with a conical tip as a force sensor. The piezoelectric micro-force sensor is mounted on top of a tube scanner. The sample is put on the sample stage facing the tip. The novel DFM has proven to be stable for probing the surface of full wafers with a vertical resolution of about 0.12 nm. The design and performance of the novel tip scanning DFM is explained in detail in this report.

AB - In this study we demonstrate the structure of a new dynamic force microscope (DFM) compatible with full wafer inspection. It is a tip-scanning-type DFM based on a piezoelectric micro-cantilever integrated with a conical tip as a force sensor. The piezoelectric micro-force sensor is mounted on top of a tube scanner. The sample is put on the sample stage facing the tip. The novel DFM has proven to be stable for probing the surface of full wafers with a vertical resolution of about 0.12 nm. The design and performance of the novel tip scanning DFM is explained in detail in this report.

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KW - DFM

KW - Micro-force sensor

KW - Piezoelectric

KW - Sol-gel

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M3 - 文章

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EP - 7158

JO - Japanese Journal of Applied Physics

JF - Japanese Journal of Applied Physics

IS - 12 B

ER -

Tip-scanning dynamic force microscope using piezoelectric cantilever for full wafer inspection

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