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Three modes in a radio frequency atmospheric pressure glow discharge

  • J. J. Shi
  • , X. T. Deng
  • , R. Hall
  • , J. D. Punnett
  • , M. G. Kong

科研成果: 期刊稿件文章同行评审

125 引用 (Scopus)

摘要

A radio frequency atmospheric pressure glow discharge (APGD) was studied with measurement of discharge voltage, current, dissipated plasma power and plasma impedance. As the rf power was switched on and the matching impedance suitably set, a pale-purple glow was generated in the interelectrode gap. With increasing rf power, the pale glow evolved into a brighter and shrunken plasma channel. The dynamic evolution of rf APGD was characterized from the abnormal glow mode, through sheath breakdown, to the recovery mode.

源语言英语
页(从-至)6303-6310
页数8
期刊Journal of Applied Physics
94
10
DOI
出版状态已出版 - 15 11月 2003

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