摘要
A radio frequency atmospheric pressure glow discharge (APGD) was studied with measurement of discharge voltage, current, dissipated plasma power and plasma impedance. As the rf power was switched on and the matching impedance suitably set, a pale-purple glow was generated in the interelectrode gap. With increasing rf power, the pale glow evolved into a brighter and shrunken plasma channel. The dynamic evolution of rf APGD was characterized from the abnormal glow mode, through sheath breakdown, to the recovery mode.
| 源语言 | 英语 |
|---|---|
| 页(从-至) | 6303-6310 |
| 页数 | 8 |
| 期刊 | Journal of Applied Physics |
| 卷 | 94 |
| 期 | 10 |
| DOI | |
| 出版状态 | 已出版 - 15 11月 2003 |
学术指纹
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