TY - GEN
T1 - Three-In-One Chip Designed for Wide Range Vacuum Sensing
AU - Qiao, Jingping
AU - Ruiwenliu,
AU - Kong, Yanmei
AU - Jiao, Binbin
AU - Hou, Zhanqiang
AU - Han, Feng
AU - Yun, Shichang
AU - Ye, Yuxin
AU - Du, Xangbin
AU - Wang, Zilong
AU - Li, Sibo
N1 - Publisher Copyright:
© 2025 IEEE.
PY - 2025
Y1 - 2025
N2 - This is the first time that a MEMS piezoresistive low-vacuum sensitive structure, a MEMS Pirani mediumvacuum sensitive structure, and a MEMS resonant highvacuum sensitive structure were integrated and designed on a single chip. Wide-range and high-accuracy vacuum measurements can be realized by this integrated chip. To avoid mutual crosstalk between the three sensitive mechanisms leading to chip failure, thermal isolation, and electromagnetic shielding structures are designed to suppress thermal crosstalk and electromagnetic shielding crosstalk. Capable of vacuum measurement from high vacuum to atmospheric pressure.
AB - This is the first time that a MEMS piezoresistive low-vacuum sensitive structure, a MEMS Pirani mediumvacuum sensitive structure, and a MEMS resonant highvacuum sensitive structure were integrated and designed on a single chip. Wide-range and high-accuracy vacuum measurements can be realized by this integrated chip. To avoid mutual crosstalk between the three sensitive mechanisms leading to chip failure, thermal isolation, and electromagnetic shielding structures are designed to suppress thermal crosstalk and electromagnetic shielding crosstalk. Capable of vacuum measurement from high vacuum to atmospheric pressure.
UR - https://www.scopus.com/pages/publications/105018745464
U2 - 10.1109/NEMS67320.2025.11169794
DO - 10.1109/NEMS67320.2025.11169794
M3 - 会议稿件
AN - SCOPUS:105018745464
T3 - 2025 IEEE 20th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2025
SP - 288
EP - 291
BT - 2025 IEEE 20th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2025
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 20th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2025
Y2 - 11 May 2025 through 14 May 2025
ER -