Thin film formation-a fabrication on non-planar surface by spray coating method

M. Ichiki; Lulu Zhang; Zhen Yang; T. Ikehara; R. Maeda

doi:10.1109/DTIP.2003.1287057

Thin film formation-a fabrication on non-planar surface by spray coating method

M. Ichiki
, Lulu Zhang
, Zhen Yang
, T. Ikehara
, R. Maeda

National Institute of Advanced Industrial Science and Technology

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

摘要

This paper presents a three-dimensional micro fabrication and integration technology of smart materials for MEMS by spray coating method. It is shown that SCM is proved most effective in additional deposition on non-planar surface. PZT film is formed both on flat and non-flat surface and its thickness is around 1 μm. Perovskite structure is formed in suitable heat treatment. Ferroelectric P-E hysteresis loop is also obtained. This paper is the first report on deposition of smart materials for MEMS with use of spray coating method from our group and also other researchers. Spray coating method has been proposed for three-dimensional coating method. It is also possible for spray coating method to deposit piezoelectrics, pyroelectrics, magnetics, etc., for sensor and/or actuator after improvement of system construction. Hydrophilic and hydrophobic properties between substrate surface and ejected liquid are most essential process factor of spray coating method in order to improve the film growth condition.

源语言	英语
主期刊名	DTIP 2003 - Design, Test, Integration and Packaging of MEMS/MOEMS 2003
编辑	Bernard Courtois, Jean Michel Karam, Jan Korvink, Karen Markus, Keren Bergman, Bernd Michel
出版商	Institute of Electrical and Electronics Engineers Inc.
页	300-303
页数	4
ISBN（电子版）	078037066X, 9780780370661
DOI	https://doi.org/10.1109/DTIP.2003.1287057
出版状态	已出版 - 2003
已对外发布	是
活动	5th Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003, DTIP 2003 - Cannes, 法国期限: 5 5月 2003 → 7 5月 2003

丛书

姓名	DTIP 2003 - Design, Test, Integration and Packaging of MEMS/MOEMS 2003

会议

会议	5th Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003, DTIP 2003
国家/地区	法国
市	Cannes
时期	5/05/03 → 7/05/03

访问文件

10.1109/DTIP.2003.1287057

其它文件与链接

链接到 Scopus 的出版物

引用此

Ichiki, M., Zhang, L., Yang, Z., Ikehara, T., & Maeda, R. (2003). Thin film formation-a fabrication on non-planar surface by spray coating method. 在 B. Courtois, J. M. Karam, J. Korvink, K. Markus, K. Bergman, & B. Michel (版本), DTIP 2003 - Design, Test, Integration and Packaging of MEMS/MOEMS 2003 (页码 300-303). 期刊论文 1287057 (DTIP 2003 - Design, Test, Integration and Packaging of MEMS/MOEMS 2003). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/DTIP.2003.1287057

Ichiki, M. ; Zhang, Lulu ; Yang, Zhen 等. / Thin film formation-a fabrication on non-planar surface by spray coating method. DTIP 2003 - Design, Test, Integration and Packaging of MEMS/MOEMS 2003. 编辑 / Bernard Courtois ; Jean Michel Karam ; Jan Korvink ; Karen Markus ; Keren Bergman ; Bernd Michel. Institute of Electrical and Electronics Engineers Inc., 2003. 页码 300-303 (DTIP 2003 - Design, Test, Integration and Packaging of MEMS/MOEMS 2003).

@inproceedings{5dfbd6074c334125b22e7882d85a2789,

title = "Thin film formation-a fabrication on non-planar surface by spray coating method",

abstract = "This paper presents a three-dimensional micro fabrication and integration technology of smart materials for MEMS by spray coating method. It is shown that SCM is proved most effective in additional deposition on non-planar surface. PZT film is formed both on flat and non-flat surface and its thickness is around 1 μm. Perovskite structure is formed in suitable heat treatment. Ferroelectric P-E hysteresis loop is also obtained. This paper is the first report on deposition of smart materials for MEMS with use of spray coating method from our group and also other researchers. Spray coating method has been proposed for three-dimensional coating method. It is also possible for spray coating method to deposit piezoelectrics, pyroelectrics, magnetics, etc., for sensor and/or actuator after improvement of system construction. Hydrophilic and hydrophobic properties between substrate surface and ejected liquid are most essential process factor of spray coating method in order to improve the film growth condition.",

keywords = "Coatings, Fabrication, Ferroelectric films, Ferroelectric materials, Heat treatment, Magnetic hysteresis, Micromechanical devices, Spraying, Surface treatment, Transistors",

author = "M. Ichiki and Lulu Zhang and Zhen Yang and T. Ikehara and R. Maeda",

note = "Publisher Copyright: {\textcopyright} 2003 IEEE.; 5th Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003, DTIP 2003 ; Conference date: 05-05-2003 Through 07-05-2003",

year = "2003",

doi = "10.1109/DTIP.2003.1287057",

language = "英语",

series = "DTIP 2003 - Design, Test, Integration and Packaging of MEMS/MOEMS 2003",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "300--303",

editor = "Bernard Courtois and Karam, \{Jean Michel\} and Jan Korvink and Karen Markus and Keren Bergman and Bernd Michel",

booktitle = "DTIP 2003 - Design, Test, Integration and Packaging of MEMS/MOEMS 2003",

}

Ichiki, M, Zhang, L, Yang, Z, Ikehara, T & Maeda, R 2003, Thin film formation-a fabrication on non-planar surface by spray coating method. 在 B Courtois, JM Karam, J Korvink, K Markus, K Bergman & B Michel (版本), DTIP 2003 - Design, Test, Integration and Packaging of MEMS/MOEMS 2003., 1287057, DTIP 2003 - Design, Test, Integration and Packaging of MEMS/MOEMS 2003, Institute of Electrical and Electronics Engineers Inc., 页码 300-303, 5th Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003, DTIP 2003, Cannes, 法国, 5/05/03. https://doi.org/10.1109/DTIP.2003.1287057

Thin film formation-a fabrication on non-planar surface by spray coating method. / Ichiki, M.; Zhang, Lulu; Yang, Zhen 等.
DTIP 2003 - Design, Test, Integration and Packaging of MEMS/MOEMS 2003. 编辑 / Bernard Courtois; Jean Michel Karam; Jan Korvink; Karen Markus; Keren Bergman; Bernd Michel. Institute of Electrical and Electronics Engineers Inc., 2003. 页码 300-303 1287057 (DTIP 2003 - Design, Test, Integration and Packaging of MEMS/MOEMS 2003).

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

TY - GEN

T1 - Thin film formation-a fabrication on non-planar surface by spray coating method

AU - Ichiki, M.

AU - Zhang, Lulu

AU - Yang, Zhen

AU - Ikehara, T.

AU - Maeda, R.

PY - 2003

Y1 - 2003

N2 - This paper presents a three-dimensional micro fabrication and integration technology of smart materials for MEMS by spray coating method. It is shown that SCM is proved most effective in additional deposition on non-planar surface. PZT film is formed both on flat and non-flat surface and its thickness is around 1 μm. Perovskite structure is formed in suitable heat treatment. Ferroelectric P-E hysteresis loop is also obtained. This paper is the first report on deposition of smart materials for MEMS with use of spray coating method from our group and also other researchers. Spray coating method has been proposed for three-dimensional coating method. It is also possible for spray coating method to deposit piezoelectrics, pyroelectrics, magnetics, etc., for sensor and/or actuator after improvement of system construction. Hydrophilic and hydrophobic properties between substrate surface and ejected liquid are most essential process factor of spray coating method in order to improve the film growth condition.

AB - This paper presents a three-dimensional micro fabrication and integration technology of smart materials for MEMS by spray coating method. It is shown that SCM is proved most effective in additional deposition on non-planar surface. PZT film is formed both on flat and non-flat surface and its thickness is around 1 μm. Perovskite structure is formed in suitable heat treatment. Ferroelectric P-E hysteresis loop is also obtained. This paper is the first report on deposition of smart materials for MEMS with use of spray coating method from our group and also other researchers. Spray coating method has been proposed for three-dimensional coating method. It is also possible for spray coating method to deposit piezoelectrics, pyroelectrics, magnetics, etc., for sensor and/or actuator after improvement of system construction. Hydrophilic and hydrophobic properties between substrate surface and ejected liquid are most essential process factor of spray coating method in order to improve the film growth condition.

KW - Coatings

KW - Fabrication

KW - Ferroelectric films

KW - Ferroelectric materials

KW - Heat treatment

KW - Magnetic hysteresis

KW - Micromechanical devices

KW - Spraying

KW - Surface treatment

KW - Transistors

UR - https://www.scopus.com/pages/publications/84945963746

U2 - 10.1109/DTIP.2003.1287057

DO - 10.1109/DTIP.2003.1287057

M3 - 会议稿件

AN - SCOPUS:84945963746

T3 - DTIP 2003 - Design, Test, Integration and Packaging of MEMS/MOEMS 2003

SP - 300

EP - 303

BT - DTIP 2003 - Design, Test, Integration and Packaging of MEMS/MOEMS 2003

A2 - Courtois, Bernard

A2 - Karam, Jean Michel

A2 - Korvink, Jan

A2 - Markus, Karen

A2 - Bergman, Keren

A2 - Michel, Bernd

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 5th Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003, DTIP 2003

Y2 - 5 May 2003 through 7 May 2003

ER -

Ichiki M, Zhang L, Yang Z, Ikehara T, Maeda R. Thin film formation-a fabrication on non-planar surface by spray coating method. 在 Courtois B, Karam JM, Korvink J, Markus K, Bergman K, Michel B, 编辑, DTIP 2003 - Design, Test, Integration and Packaging of MEMS/MOEMS 2003. Institute of Electrical and Electronics Engineers Inc. 2003. 页码 300-303. 1287057. (DTIP 2003 - Design, Test, Integration and Packaging of MEMS/MOEMS 2003). doi: 10.1109/DTIP.2003.1287057

Thin film formation-a fabrication on non-planar surface by spray coating method

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