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Thin film based flexible current sensor using a micropatterned Cu coil

科研成果: 书/报告/会议事项章节会议稿件同行评审

1 引用 (Scopus)

摘要

This paper reports a novel thin film based flexible clamp-on type current sensor with 250 turns micropatterned Cu coil (line/space = 50 μm/105 μm) formed by through-holes and flexible printed circuits (FPC) technologies for wireless sensor networks. Using flexible electronics techniques, microvias and fine stripe Cu patterns could be formed around 60-mm-long and 14.5-mm-wide permalloy film sandwiched between 40-mm-lomg and 20-mm-wide polyimide films with a high precision. Since the sensor has high flexibility, it can be used by winding the cable and drastically reduce the installation space. Furthermore, it can construct wireless sensor networks without external power supply because wireless nodes can drive by utilizing the secondary current generated in the coil of the sensor by the behavior of current transformer. Coil resistance between contact pads was about 241 Ω. The output voltage (V) changed linearly with variation of the value of primary current (Cp) in the 0 to 20 A range. Cp-F sensitivity was about 39.4 mV/A. The sensor can be fabricated by roll-to-roll FPC mass production facility because it is developed using only FPC technology.

源语言英语
主期刊名Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2017
编辑Benoit Charlot, Pascal Nouet, Claude Pellet, Yoshio Mita, Francis Pressecq, Peter Schneider, Stewart Smith
出版商Institute of Electrical and Electronics Engineers Inc.
ISBN(电子版)9781538629529
DOI
出版状态已出版 - 18 7月 2017
已对外发布
活动19th Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2017 - Bordeaux, 法国
期限: 29 5月 20171 6月 2017

出版系列

姓名Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2017

会议

会议19th Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2017
国家/地区法国
Bordeaux
时期29/05/171/06/17

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