Thermodynamical analysis of conductivity-type inversion in ZnO

In order to get more knowledge about the difficulty of conductivity-type inversion in ZnO, this paper performs the thermodynamical analysis of intrinsic point defects. Relations between the main defect concentrations and the environment parameters, such as the temperature and oxygen pressure, have been formulated under thermodynamical equilibrium. The K-V figure is presented. It is shown that it is very difficult to obtain p-type conductivity under thermodynamical equilibrium. Based on these facts, this paper gives the effective approaches to realize p-type conductivity inversion. The feasibility of the analysis is also proved by some experiments.