Thermal imprinting stepper consisting of rapid mold temperature control system

H. Kishi; H. Yoshioka; Y. Jianguo; N. Sumiyoshi; H. Goto; Y. Murakoshi; R. Maeda

doi:10.1109/IMNC.2003.1268618

Thermal imprinting stepper consisting of rapid mold temperature control system

H. Kishi
, H. Yoshioka
, Y. Jianguo
, N. Sumiyoshi
, H. Goto
, Y. Murakoshi
, R. Maeda

Mitsui & Co., Ltd.
National Institute of Advanced Industrial Science and Technology

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

1 引用（Scopus）

摘要

We introduce a new step and repeat type nanoimprinting lithography (NIL) system consisting of rapid thermal control system to minimize heat cycle of nanoimprinting system. The design and experimental results are described in this paper.

源语言	英语
主期刊名	Digest of Papers - Microprocesses and Nanotechnology 2003 - 2003 International Microprocesses and Nanotechnology Conference, MNC 2003
出版商	Institute of Electrical and Electronics Engineers Inc.
页	146-147
页数	2
ISBN（电子版）	4891140402, 9784891140403
DOI	https://doi.org/10.1109/IMNC.2003.1268618
出版状态	已出版 - 2003
已对外发布	是
活动	International Microprocesses and Nanotechnology Conference, MNC 2003 - Tokyo, 日本期限: 29 10月 2003 → 31 10月 2003

出版系列

姓名	Digest of Papers - Microprocesses and Nanotechnology 2003 - 2003 International Microprocesses and Nanotechnology Conference, MNC 2003

会议

会议	International Microprocesses and Nanotechnology Conference, MNC 2003
国家/地区	日本
市	Tokyo
时期	29/10/03 → 31/10/03

访问文件

10.1109/IMNC.2003.1268618

其它文件与链接

链接到 Scopus 的出版物

引用此

Kishi, H., Yoshioka, H., Jianguo, Y., Sumiyoshi, N., Goto, H., Murakoshi, Y., & Maeda, R. (2003). Thermal imprinting stepper consisting of rapid mold temperature control system. 在 Digest of Papers - Microprocesses and Nanotechnology 2003 - 2003 International Microprocesses and Nanotechnology Conference, MNC 2003 (页码 146-147). 文章 1268618 (Digest of Papers - Microprocesses and Nanotechnology 2003 - 2003 International Microprocesses and Nanotechnology Conference, MNC 2003). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/IMNC.2003.1268618

Kishi, H. ; Yoshioka, H. ; Jianguo, Y. 等. / Thermal imprinting stepper consisting of rapid mold temperature control system. Digest of Papers - Microprocesses and Nanotechnology 2003 - 2003 International Microprocesses and Nanotechnology Conference, MNC 2003. Institute of Electrical and Electronics Engineers Inc., 2003. 页码 146-147 (Digest of Papers - Microprocesses and Nanotechnology 2003 - 2003 International Microprocesses and Nanotechnology Conference, MNC 2003).

@inproceedings{b8bec5d140cf4397a051572a3f383c52,

title = "Thermal imprinting stepper consisting of rapid mold temperature control system",

abstract = "We introduce a new step and repeat type nanoimprinting lithography (NIL) system consisting of rapid thermal control system to minimize heat cycle of nanoimprinting system. The design and experimental results are described in this paper.",

author = "H. Kishi and H. Yoshioka and Y. Jianguo and N. Sumiyoshi and H. Goto and Y. Murakoshi and R. Maeda",

note = "Publisher Copyright: {\textcopyright} 2003 Japan Soc. of Applied.; International Microprocesses and Nanotechnology Conference, MNC 2003 ; Conference date: 29-10-2003 Through 31-10-2003",

year = "2003",

doi = "10.1109/IMNC.2003.1268618",

language = "英语",

series = "Digest of Papers - Microprocesses and Nanotechnology 2003 - 2003 International Microprocesses and Nanotechnology Conference, MNC 2003",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "146--147",

booktitle = "Digest of Papers - Microprocesses and Nanotechnology 2003 - 2003 International Microprocesses and Nanotechnology Conference, MNC 2003",

}

Kishi, H, Yoshioka, H, Jianguo, Y, Sumiyoshi, N, Goto, H, Murakoshi, Y & Maeda, R 2003, Thermal imprinting stepper consisting of rapid mold temperature control system. 在 Digest of Papers - Microprocesses and Nanotechnology 2003 - 2003 International Microprocesses and Nanotechnology Conference, MNC 2003., 1268618, Digest of Papers - Microprocesses and Nanotechnology 2003 - 2003 International Microprocesses and Nanotechnology Conference, MNC 2003, Institute of Electrical and Electronics Engineers Inc., 页码 146-147, International Microprocesses and Nanotechnology Conference, MNC 2003, Tokyo, 日本, 29/10/03. https://doi.org/10.1109/IMNC.2003.1268618

Thermal imprinting stepper consisting of rapid mold temperature control system. / Kishi, H.; Yoshioka, H.; Jianguo, Y. 等.
Digest of Papers - Microprocesses and Nanotechnology 2003 - 2003 International Microprocesses and Nanotechnology Conference, MNC 2003. Institute of Electrical and Electronics Engineers Inc., 2003. 页码 146-147 1268618 (Digest of Papers - Microprocesses and Nanotechnology 2003 - 2003 International Microprocesses and Nanotechnology Conference, MNC 2003).

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

TY - GEN

T1 - Thermal imprinting stepper consisting of rapid mold temperature control system

AU - Kishi, H.

AU - Yoshioka, H.

AU - Jianguo, Y.

AU - Sumiyoshi, N.

AU - Goto, H.

AU - Murakoshi, Y.

AU - Maeda, R.

PY - 2003

Y1 - 2003

N2 - We introduce a new step and repeat type nanoimprinting lithography (NIL) system consisting of rapid thermal control system to minimize heat cycle of nanoimprinting system. The design and experimental results are described in this paper.

AB - We introduce a new step and repeat type nanoimprinting lithography (NIL) system consisting of rapid thermal control system to minimize heat cycle of nanoimprinting system. The design and experimental results are described in this paper.

UR - https://www.scopus.com/pages/publications/84949214938

U2 - 10.1109/IMNC.2003.1268618

DO - 10.1109/IMNC.2003.1268618

M3 - 会议稿件

AN - SCOPUS:84949214938

T3 - Digest of Papers - Microprocesses and Nanotechnology 2003 - 2003 International Microprocesses and Nanotechnology Conference, MNC 2003

SP - 146

EP - 147

BT - Digest of Papers - Microprocesses and Nanotechnology 2003 - 2003 International Microprocesses and Nanotechnology Conference, MNC 2003

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - International Microprocesses and Nanotechnology Conference, MNC 2003

Y2 - 29 October 2003 through 31 October 2003

ER -

Kishi H, Yoshioka H, Jianguo Y, Sumiyoshi N, Goto H, Murakoshi Y 等. Thermal imprinting stepper consisting of rapid mold temperature control system. 在 Digest of Papers - Microprocesses and Nanotechnology 2003 - 2003 International Microprocesses and Nanotechnology Conference, MNC 2003. Institute of Electrical and Electronics Engineers Inc. 2003. 页码 146-147. 1268618. (Digest of Papers - Microprocesses and Nanotechnology 2003 - 2003 International Microprocesses and Nanotechnology Conference, MNC 2003). doi: 10.1109/IMNC.2003.1268618

Thermal imprinting stepper consisting of rapid mold temperature control system

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