The research of a micro-silicon integrated multi-sensor

A micro-silicon integrated multi-sensor including three-axis accelerometers, an absolute pressure sensor and a temperature sensor is described. The purpose application of the integrated sensor meets the demands of little volume and multi parameters. The interference between sensors each other is eliminated because of the design of the integrated structure and the detected circuit. The three axis accelerometers and absolute pressure sensor use a bulk micromachined diaphragm structure with piezoresistors. For temperature sensing, a silicon temperature sensor is fabricated based on the spreading resistance principle. The size of the integrated multi-sensor is 4 mm×6 mm ×0.9 mm. The test results of the integrated sensor are shown.