The double-bridge beam structure with slots for microaccelerometer

Aiming at the increasingly demanding needs for high sensitivity and high response frequency, a novel accelerometer chip structure is proposed based on the improvement of stress distribution of the traditional double-bridge beam structure. Analysis and simulation proved that the double-bridge beam structure with slots, named as DBBS structure, got a better sensitivity and a satisfactory natural frequency compared with the double-bridge beam structure. The detailed fabrication processes were studied. Finally, faith of the prospective of the DBBS structure could be paid for the future applications in failure diagnosis, automobile detection, sports equipments and so