摘要
A nano-cerium dioxide hydrosol was synthesized via a sol-gel process at the range of room temperature to 65°C with the nonionic surfactant PVP (polyvinylpyrrolidone). The mixture solution of cerium nitrate and urea turned out a visible chemical reaction under the catalysis of ammonia. The X-ray diffraction (XRD), transmission electron microscopy (TEM), and X-ray photoelectron spectroscopy (XPS) analyses indicated the colloidal ingredient and nano-crystal structural information. The colloid was crystalline face-centered cubic nano-structured cerium dioxide. The sizes of CeO 2 colloids are in the range of several nanometers to 10 nm or more. The application of the hydrosol may focus on the ceria-based polishing agent for chemical mechanical polishing (CMP) process.
| 源语言 | 英语 |
|---|---|
| 页(从-至) | S501-S504 |
| 期刊 | Ceramics International |
| 卷 | 38 |
| 期 | SUPPL. 1 |
| DOI | |
| 出版状态 | 已出版 - 1月 2012 |
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