TY - GEN
T1 - Synchronized oscillation in micro-mechanically coupled oscillator system
T2 - 2013 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2013
AU - Nakajima, Mamoru
AU - Wang, Dong F.
AU - Ikehara, Tsuyoshi
AU - Itob, Takumi
AU - Maeda, Ryutaro
PY - 2013
Y1 - 2013
N2 - A novel oscillation system, which consists of a U-shaped cantilever and a beam-shaped cantilever, was designed, fabricated and characterized for synchronized oscillation-based applications. Two geometrically different cantilevers, with resonant frequencies of 372.503 kHz (detecting) and 182.506 kHz (sensing), are coupled by two coupling overhangs. Under synchronized oscillation, the frequency response was found to double from 182.850 kHz to 365.713 kHz from low frequency cantilever (U-shaped) to high frequency cantilever (beam-shaped). A plateau with a frequency ratio of 2.000 was observed, which corresponds to a stable synchronization region. On the other hand, the super-harmonic oscillation was also demonstrated when the oscillator with higher frequency (beam-shaped) was driven by a higher AC voltage of 4.0 Vpp at approximately half of the primary resonance. In this case, a doubled frequency response of 371.875 kHz can be observed and called as the super-harmonic resonance of 2 degree.
AB - A novel oscillation system, which consists of a U-shaped cantilever and a beam-shaped cantilever, was designed, fabricated and characterized for synchronized oscillation-based applications. Two geometrically different cantilevers, with resonant frequencies of 372.503 kHz (detecting) and 182.506 kHz (sensing), are coupled by two coupling overhangs. Under synchronized oscillation, the frequency response was found to double from 182.850 kHz to 365.713 kHz from low frequency cantilever (U-shaped) to high frequency cantilever (beam-shaped). A plateau with a frequency ratio of 2.000 was observed, which corresponds to a stable synchronization region. On the other hand, the super-harmonic oscillation was also demonstrated when the oscillator with higher frequency (beam-shaped) was driven by a higher AC voltage of 4.0 Vpp at approximately half of the primary resonance. In this case, a doubled frequency response of 371.875 kHz can be observed and called as the super-harmonic resonance of 2 degree.
KW - Coupling overhang
KW - Double region
KW - Nonlinearity
KW - Super-harmonic oscillation
KW - Synchronized oscillation
KW - U-shaped oscillator system
KW - Ultimate sensing
UR - https://www.scopus.com/pages/publications/84883060973
M3 - 会议稿件
AN - SCOPUS:84883060973
SN - 9781467344777
T3 - 2013 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2013
BT - 2013 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2013
Y2 - 16 April 2013 through 18 April 2013
ER -