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Super-resolution reconstruction of speckle phase in depth-resolved wavelength scanning interference using the total least-squares analysis

  • Ziliang Lyu
  • , Yulei Bai
  • , Zhaoshui He
  • , Shengli Xie
  • , Zongze Wu
  • , Bo Dong
  • Guangdong University of Technology
  • Guangdong Key Laboratory of IoT Information Technology
  • Guangdong Engineering Center of Auto-detection Technology for Intelligent Manufacturing
  • State Key Laboratory for Precision Electronics Manufacturing Technology and Equipment
  • Beihang University

科研成果: 期刊稿件 › 文章 › 同行评审

6 引用 (Scopus)

摘要

Depth-resolved wavelength scanning interferometry (DRWSI) is a tomographic imaging tool that employs phase measurement to visualize micro-displacement inside a sample. It is well known that the depth resolution of DRWSI is restricted by a wavelength scanning range. Recently, a nonlinear least-squares analysis (NLS) algorithm was proposed to overcome the limitation of the wavelength scanning range to achieve super-resolution; however, the NLS failed to measure speckle surfaces owing to the sensibility of initial values. To the best of our knowledge, the improvement of depth resolution on measuring a speckle surface remains an open issue for DRWSI. For this study, we redesigned the signal processing algorithm for DRWSI to refine the depth resolution when considering the case of speckle phase measurement. It is mathematically shown that the DRWSI’s signal is derived as a model of total least-squares analysis (TLSA). Subsequently, a super-resolution of the speckle phase map was obtained using a singular value decomposition. Further, a numerical simulation to measure the micro-displacements for speckle surfaces was performed to validate the TLSA, and the results show that it can precisely reconstruct the displacements of layers whose depth distance is 5 μm. This study thus provides an opportunity to improve the DRWSI’s depth resolution.

源语言英语
页(从-至)869-876
页数8
期刊Journal of the Optical Society of America A: Optics and Image Science, and Vision
卷36
期5
DOI
出版状态已出版 - 5月 2019
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