TY - GEN
T1 - Sub-surface layer of silicon singe crystal periodically nanostructured by near-infrared femtosecond laser pulses
AU - Gnilitskyi, Iaroslav
AU - Gruzdev, Vitaly
AU - He, Xiaoqing
AU - Sergaeva, Olga
AU - Ji, Pengfei
AU - White, Tommi
AU - Zhang, Yuwen
N1 - Publisher Copyright:
© OSA 2018
PY - 2018
Y1 - 2018
N2 - Structure of subsurface layer beneath silicon single-crystal surface periodically nanostructured by femtosecond laser suggests significant contribution of laser-driven defect generation to formation of periodic surface ripples by few laser pulses in a broad fluence range.
AB - Structure of subsurface layer beneath silicon single-crystal surface periodically nanostructured by femtosecond laser suggests significant contribution of laser-driven defect generation to formation of periodic surface ripples by few laser pulses in a broad fluence range.
UR - https://www.scopus.com/pages/publications/85059408578
U2 - 10.1364/cleopr.2018.w4b.3
DO - 10.1364/cleopr.2018.w4b.3
M3 - 会议稿件
AN - SCOPUS:85059408578
SN - 9781943580453
T3 - Optics InfoBase Conference Papers
BT - Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2018
PB - Optica Publishing Group (formerly OSA)
T2 - Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2018
Y2 - 29 July 2018 through 3 August 2018
ER -