Sub-Surface Layer of Silicon Singe Crystal Periodically Nanostructured by Near-Infrared Femtosecond Laser Pulses

Iaroslav Gnilitskyi; Vitaly Gruzdev; Xiaoqing He; Olga Sergaeva; Pengfei Ji; Tommi White; Yuwen Zhang

Sub-Surface Layer of Silicon Singe Crystal Periodically Nanostructured by Near-Infrared Femtosecond Laser Pulses

Iaroslav Gnilitskyi
, Vitaly Gruzdev
, Xiaoqing He
, Olga Sergaeva
, Pengfei Ji
, Tommi White
, Yuwen Zhang

University of Modena and Reggio Emilia
University of Missouri
Southern University of Science and Technology

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

1 引用（Scopus）

摘要

Structure of subsurface layer beneath silicon single-crystal surface periodically nanostructured by femtosecond laser suggests significant contribution of laser-driven defect generation to formation of periodic surface ripples by few laser pulses in a broad fluence range.

源语言	英语
主期刊名	2018 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2018
出版商	Institute of Electrical and Electronics Engineers Inc.
ISBN（电子版）	9781943580453
出版状态	已出版 - 2 7月 2018
已对外发布	是
活动	2018 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2018 - Wanchai, 香港期限: 29 7月 2018 → 3 8月 2018

出版系列

姓名	2018 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2018

会议

会议	2018 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2018
国家/地区	香港
市	Wanchai
时期	29/07/18 → 3/08/18

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Gnilitskyi, I., Gruzdev, V., He, X., Sergaeva, O., Ji, P., White, T., & Zhang, Y. (2018). Sub-Surface Layer of Silicon Singe Crystal Periodically Nanostructured by Near-Infrared Femtosecond Laser Pulses. 在 2018 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2018 文章 8699886 (2018 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2018). Institute of Electrical and Electronics Engineers Inc..

Gnilitskyi, Iaroslav ; Gruzdev, Vitaly ; He, Xiaoqing 等. / Sub-Surface Layer of Silicon Singe Crystal Periodically Nanostructured by Near-Infrared Femtosecond Laser Pulses. 2018 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2018. Institute of Electrical and Electronics Engineers Inc., 2018. (2018 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2018).

@inproceedings{c4c730b82ba040649a2cf3c6b5f75192,

title = "Sub-Surface Layer of Silicon Singe Crystal Periodically Nanostructured by Near-Infrared Femtosecond Laser Pulses",

abstract = "Structure of subsurface layer beneath silicon single-crystal surface periodically nanostructured by femtosecond laser suggests significant contribution of laser-driven defect generation to formation of periodic surface ripples by few laser pulses in a broad fluence range.",

author = "Iaroslav Gnilitskyi and Vitaly Gruzdev and Xiaoqing He and Olga Sergaeva and Pengfei Ji and Tommi White and Yuwen Zhang",

note = "Publisher Copyright: {\textcopyright} 2018 OSA.; 2018 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2018 ; Conference date: 29-07-2018 Through 03-08-2018",

year = "2018",

month = jul,

day = "2",

language = "英语",

series = "2018 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2018",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

booktitle = "2018 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2018",

}

Gnilitskyi, I, Gruzdev, V, He, X, Sergaeva, O, Ji, P, White, T & Zhang, Y 2018, Sub-Surface Layer of Silicon Singe Crystal Periodically Nanostructured by Near-Infrared Femtosecond Laser Pulses. 在 2018 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2018., 8699886, 2018 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2018, Institute of Electrical and Electronics Engineers Inc., 2018 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2018, Wanchai, 香港, 29/07/18.

Sub-Surface Layer of Silicon Singe Crystal Periodically Nanostructured by Near-Infrared Femtosecond Laser Pulses. / Gnilitskyi, Iaroslav; Gruzdev, Vitaly; He, Xiaoqing 等.
2018 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2018. Institute of Electrical and Electronics Engineers Inc., 2018. 8699886 (2018 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2018).

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

TY - GEN

T1 - Sub-Surface Layer of Silicon Singe Crystal Periodically Nanostructured by Near-Infrared Femtosecond Laser Pulses

AU - Gnilitskyi, Iaroslav

AU - Gruzdev, Vitaly

AU - He, Xiaoqing

AU - Sergaeva, Olga

AU - Ji, Pengfei

AU - White, Tommi

AU - Zhang, Yuwen

PY - 2018/7/2

Y1 - 2018/7/2

N2 - Structure of subsurface layer beneath silicon single-crystal surface periodically nanostructured by femtosecond laser suggests significant contribution of laser-driven defect generation to formation of periodic surface ripples by few laser pulses in a broad fluence range.

AB - Structure of subsurface layer beneath silicon single-crystal surface periodically nanostructured by femtosecond laser suggests significant contribution of laser-driven defect generation to formation of periodic surface ripples by few laser pulses in a broad fluence range.

UR - https://www.scopus.com/pages/publications/85065608258

M3 - 会议稿件

AN - SCOPUS:85065608258

T3 - 2018 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2018

BT - 2018 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2018

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 2018 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2018

Y2 - 29 July 2018 through 3 August 2018

ER -

Gnilitskyi I, Gruzdev V, He X, Sergaeva O, Ji P, White T 等. Sub-Surface Layer of Silicon Singe Crystal Periodically Nanostructured by Near-Infrared Femtosecond Laser Pulses. 在 2018 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2018. Institute of Electrical and Electronics Engineers Inc. 2018. 8699886. (2018 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2018).

Sub-Surface Layer of Silicon Singe Crystal Periodically Nanostructured by Near-Infrared Femtosecond Laser Pulses

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