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Study on Micromachining of Polycrystalline Diamond by UV Nanosecond Laser

  • Xi'an Jiaotong University

科研成果: 期刊稿件文章同行评审

6 引用 (Scopus)

摘要

A single-wire cutting experiment on the polycrystalline diamond by UV nanosecond laser was carried out. The result was characterized and analyzed by the scanning electron microscope and XPS energy spectrum analysis. It found that the width and depth of grooves continue to increase with the increasing of laser power, scanning times, and the decreasing of scanning speed. A finer groove with a narrower width and deeper depth can be obtained by adjusting the focus point on the surface of the PCD material. XPS spectrum of C1s indicated that sp3 structure converts to the sp2 graphite phase and removed by photochemical mechanism when the UV nanosecond laser irradiates the PCD. Moreover, the cutting result suggests that UV nanosecond laser can achieve finer processing of PCD material.

源语言英语
页(从-至)28-38
页数11
期刊Integrated Ferroelectrics
219
1
DOI
出版状态已出版 - 2021

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