@inproceedings{db1f0aed5789471d8c57b5fff9df25d5,
title = "Study on micro-clamping mechanism in mems",
abstract = "A micro-clamping mechanism is designed and analyzed in this paper. The material used to fabricate the micro-clamping mechanism is Qbe2, and the piezoelectric ceramic is selected as the driving component that can be controlled easily. The micro-clamping mechanism has the open distance of 250 micrometers. Stability of the micro-clamping mechanism is studied to determine the thickness of the mechanism that is made of thin plate. Theoretical and experimental analyses are conduced to study the magnifying multiple of the mechanism. It is found that there exists certain difference between the theoretical and experimental results. The difference is then discussed and explained using elastic theory. Finally the characteristics of the micro-clamping mechanism are summarized and some conclusions are given.",
keywords = "Flexible hinge mechanism, Mems, Micro-clamping mechanism",
author = "Xiaonan Chen and Peilin Yang and Zhuangde Jiang and Xiaofen Liu",
year = "2001",
language = "英语",
isbn = "7900066144",
series = "Proceedings of the International Conference on Mechanical Transmissions (ICMT 2001)",
pages = "335--336",
editor = "D. Qin and X. Chen and B. Chen and C. Liu and D. Qin and X. Chen and B. Chen and C. Lin",
booktitle = "Proceedings of the International Conference on Mechanical Transmissions (ICMT 2001)",
note = "Proceedings of the International Conference on Mechanical Transmissions (ICMT 2001) ; Conference date: 05-04-2001 Through 09-04-2001",
}