摘要
This paper reports growth of InGaAs/InP nonstrained and strained layer superlattices with 40 periods on (100) InP substrates by GSMBE method using the first China-made CBE system. The samples have been characterized by high-resolution X-ray diffractometer, and In composition in the InGaAs well layer has been calculated. The results show that the superlattices have a high quality.
| 源语言 | 英语 |
|---|---|
| 页(从-至) | 725-729 |
| 页数 | 5 |
| 期刊 | Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors |
| 卷 | 16 |
| 期 | 11 |
| 出版状态 | 已出版 - 11月 1995 |
| 已对外发布 | 是 |
学术指纹
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