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Study on GSMBE growth of InGaAs/InP superlattice materials

  • Dianzhao Sun
  • , Xiaoliang Wang
  • , Xiaobing Li
  • , Hongxi Guo
  • , Chunhui Yan
  • , Jianping Li
  • , Shirong Zhu
  • , Lingxiao Li
  • , Yiping Zen
  • , Meiying Kong
  • , Xun Hou
  • CAS - Institute of Semiconductors

科研成果: 期刊稿件文章同行评审

2 引用 (Scopus)

摘要

This paper reports growth of InGaAs/InP nonstrained and strained layer superlattices with 40 periods on (100) InP substrates by GSMBE method using the first China-made CBE system. The samples have been characterized by high-resolution X-ray diffractometer, and In composition in the InGaAs well layer has been calculated. The results show that the superlattices have a high quality.

源语言英语
页(从-至)725-729
页数5
期刊Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors
16
11
出版状态已出版 - 11月 1995
已对外发布

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