TY - GEN
T1 - Study of Amplitude Saturation in T-Shape MEMS Resonators
AU - Lan, Hai
AU - Wei, Xueyong
AU - Zhao, Yulong
AU - Jiang, Zhuangde
N1 - Publisher Copyright:
© 2018 IEEE.
PY - 2018/12/3
Y1 - 2018/12/3
N2 - In order to improve the performances of MEMS oscillators, nonlinear behavior of micromechanical resonators are usually avoided or canceled in the most of research work. A new kind of nonlinear phenomenon called amplitude saturation but different from those presented before is found in a T-shape MEMS resonator in this work. Open-loop testing results clearly show the effect of driving conditions on amplitude saturation, and closed-loop results suggest that it can be used to improve the short term frequency stability of MEMS oscillators by an order of magnitude.
AB - In order to improve the performances of MEMS oscillators, nonlinear behavior of micromechanical resonators are usually avoided or canceled in the most of research work. A new kind of nonlinear phenomenon called amplitude saturation but different from those presented before is found in a T-shape MEMS resonator in this work. Open-loop testing results clearly show the effect of driving conditions on amplitude saturation, and closed-loop results suggest that it can be used to improve the short term frequency stability of MEMS oscillators by an order of magnitude.
UR - https://www.scopus.com/pages/publications/85060281851
U2 - 10.1109/NEMS.2018.8556921
DO - 10.1109/NEMS.2018.8556921
M3 - 会议稿件
AN - SCOPUS:85060281851
T3 - NEMS 2018 - 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems
SP - 102
EP - 105
BT - NEMS 2018 - 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2018
Y2 - 22 April 2018 through 26 April 2018
ER -