Static characteristics analysis of micro-actuator based on micro-stereolithography

D. H. Yu; J. J. Guo; D. C. Li; B. H. Lu; M. Yamamoto

Static characteristics analysis of micro-actuator based on micro-stereolithography

D. H. Yu
, J. J. Guo
, D. C. Li
, B. H. Lu
, M. Yamamoto

Xi'an University of Technology

科研成果: 期刊稿件 › 文章 › 同行评审

摘要

Micro stereolithography and the fabrication process of a micro-actuator manufactured by using the micro-stereolithography are introduced. The static characteristics of the micro-actuator driven by electrostatic force is analyzed in detail. Stable balance condition of movable plate electrode and range of displacement in the condition are deduced. The relationship between deflection of the movable plate electrode and the electrostatic force is shown. The results deduced by using the micro-actuator is validated.

源语言	英语
页（从-至）	47-50
页数	4
期刊	Hsi-An Chiao Tung Ta Hsueh/Journal of Xi'an Jiaotong University
卷	35
期	1
出版状态	已出版 - 1月 2001
已对外发布	是

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title = "Static characteristics analysis of micro-actuator based on micro-stereolithography",

abstract = "Micro stereolithography and the fabrication process of a micro-actuator manufactured by using the micro-stereolithography are introduced. The static characteristics of the micro-actuator driven by electrostatic force is analyzed in detail. Stable balance condition of movable plate electrode and range of displacement in the condition are deduced. The relationship between deflection of the movable plate electrode and the electrostatic force is shown. The results deduced by using the micro-actuator is validated.",

keywords = "Electrostatic force, Micro-actuator, Stable balance, Stereolithography",

author = "Yu, \{D. H.\} and Guo, \{J. J.\} and Li, \{D. C.\} and Lu, \{B. H.\} and M. Yamamoto",

year = "2001",

month = jan,

language = "英语",

volume = "35",

pages = "47--50",

journal = "Hsi-An Chiao Tung Ta Hsueh/Journal of Xi'an Jiaotong University",

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publisher = "Xi'an Jiaotong University",

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TY - JOUR

T1 - Static characteristics analysis of micro-actuator based on micro-stereolithography

AU - Yu, D. H.

AU - Guo, J. J.

AU - Li, D. C.

AU - Lu, B. H.

AU - Yamamoto, M.

PY - 2001/1

Y1 - 2001/1

N2 - Micro stereolithography and the fabrication process of a micro-actuator manufactured by using the micro-stereolithography are introduced. The static characteristics of the micro-actuator driven by electrostatic force is analyzed in detail. Stable balance condition of movable plate electrode and range of displacement in the condition are deduced. The relationship between deflection of the movable plate electrode and the electrostatic force is shown. The results deduced by using the micro-actuator is validated.

AB - Micro stereolithography and the fabrication process of a micro-actuator manufactured by using the micro-stereolithography are introduced. The static characteristics of the micro-actuator driven by electrostatic force is analyzed in detail. Stable balance condition of movable plate electrode and range of displacement in the condition are deduced. The relationship between deflection of the movable plate electrode and the electrostatic force is shown. The results deduced by using the micro-actuator is validated.

KW - Electrostatic force

KW - Micro-actuator

KW - Stable balance

KW - Stereolithography

UR - https://www.scopus.com/pages/publications/0034858725

M3 - 文章

AN - SCOPUS:0034858725

SN - 0253-987X

VL - 35

SP - 47

EP - 50

JO - Hsi-An Chiao Tung Ta Hsueh/Journal of Xi'an Jiaotong University

JF - Hsi-An Chiao Tung Ta Hsueh/Journal of Xi'an Jiaotong University

IS - 1

ER -

Static characteristics analysis of micro-actuator based on micro-stereolithography

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