摘要
This paper considers aluminum interconnects in the presence of insulators, vias, and shunts. Subject to a temperature change and a direct electric current, such an interconnect evolves - after a complicated sequence of events - into a stable state with a segment of aluminum depleted near the cathode, a linear distribution of pressure in the rest of the line, and no further mass diffusion. The electric current continues in the shunt layers where aluminum is depleted; the multilayer interconnect never opens, but its resistance has increased to a saturation level. Several aspects of this stable state are discussed, including the condition under which the high pressure near the anode does not cause the surrounding insulator to crack; the dependence of saturation resistance on shapes, materials, and loads; and the time scale for the interconnect to evolve to the stable state. Should a circuit tolerate a variable resistance up to saturation, the interconnect would function forever. Implications of this possibility are also discussed.
| 源语言 | 英语 |
|---|---|
| 页(从-至) | 3725-3732 |
| 页数 | 8 |
| 期刊 | Acta Materialia |
| 卷 | 46 |
| 期 | 11 |
| DOI | |
| 出版状态 | 已出版 - 1 7月 1998 |
| 已对外发布 | 是 |
学术指纹
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