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Split singularities: Stress field near the edge of a silicon die on a polymer substrate

  • Princeton University
  • Intel

科研成果: 期刊稿件文章同行评审

57 引用 (Scopus)

摘要

In current design the circuitry is extended very close to the edges of a silicon die to maximize useful surface area. When the die is bonded to a polymer substrate, with the circuitry facing the polymer, thermal misfit stress concentrates at the die edges and may damage the circuitry. The stress distribution near a die edge is quantified using a combination of asymptotic analysis and finite element calculation. The asymptotic field consists of two modes of singular stresses, scaling with the distance from the edge r as, respectively, r-λ1; and r-λ2, where λ1 > λ2. It is shown that the more singular field (i.e. the λ1-singularity) prevails in an exceedingly small zone, smaller than 10-6 times the die thickness. Once both modes are included, however, the asymptotic field matches the full field in a zone about 10-1 times the die thickness. This finding resolves several controversies in the literature on electronic packaging. The near-edge stress distribution is presented for various substrate thicknesses, elastic moduli and thermal expansion coefficients. The results can be used to explore design options.

源语言英语
页(从-至)67-76
页数10
期刊Acta Materialia
47
1
DOI
出版状态已出版 - 11 12月 1998
已对外发布

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