Some characteristics of PZT films produced by jet molding system

M. Ichiki; J. Akedo; A. Schroth; R. Maeda; Y. Ishikawa

Some characteristics of PZT films produced by jet molding system

M. Ichiki
, J. Akedo
, A. Schroth
, R. Maeda
, Y. Ishikawa

National Institute of Advanced Industrial Science and Technology
New Energy and Industrial Technology Development Organization

科研成果: 期刊稿件 › 文章 › 同行评审

10 引用（Scopus）

摘要

A lead zirconate titanate (Pb(Zr,Ti)O₃, PZT) thick film was produced by a jet molding system (JMS). Some of the characteristics of the PZT were clarified. A detailed surface observation by scanning electron microscopy was carried out, and showed condensation of PZT particles in as deposited film. Dielectric constant was also measured by use of an impedance analyzer, and can reach 1000 under the standard experimental conditions. Substrate heating and post annealing treatment are proved to increase the dielectric constant. These results are useful for the clarification of the process and underlying physics of the JMS technology.

源语言	英语
页（从-至）	S1501-S1503
期刊	Journal of the Korean Physical Society
卷	32
期	4 SUPPL.
出版状态	已出版 - 1998
已对外发布	是

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AU - Ichiki, M.

AU - Akedo, J.

AU - Schroth, A.

AU - Maeda, R.

AU - Ishikawa, Y.

PY - 1998

Y1 - 1998

N2 - A lead zirconate titanate (Pb(Zr,Ti)O3, PZT) thick film was produced by a jet molding system (JMS). Some of the characteristics of the PZT were clarified. A detailed surface observation by scanning electron microscopy was carried out, and showed condensation of PZT particles in as deposited film. Dielectric constant was also measured by use of an impedance analyzer, and can reach 1000 under the standard experimental conditions. Substrate heating and post annealing treatment are proved to increase the dielectric constant. These results are useful for the clarification of the process and underlying physics of the JMS technology.

AB - A lead zirconate titanate (Pb(Zr,Ti)O3, PZT) thick film was produced by a jet molding system (JMS). Some of the characteristics of the PZT were clarified. A detailed surface observation by scanning electron microscopy was carried out, and showed condensation of PZT particles in as deposited film. Dielectric constant was also measured by use of an impedance analyzer, and can reach 1000 under the standard experimental conditions. Substrate heating and post annealing treatment are proved to increase the dielectric constant. These results are useful for the clarification of the process and underlying physics of the JMS technology.

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JF - Journal of the Korean Physical Society

IS - 4 SUPPL.

ER -

Some characteristics of PZT films produced by jet molding system

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