Solid state transducers for Micro System with ferroelectric Pb(Zr,Ti)O 3 thin films

Ryutaro Maeda; Andreas Schroth; Chengkuo Lee; Jun Akedo

Solid state transducers for Micro System with ferroelectric Pb(Zr,Ti)O ₃ thin films

Ryutaro Maeda
, Andreas Schroth
, Chengkuo Lee
, Jun Akedo

仪器科学与技术学院

Metrodyne Corp. Taiwan

科研成果: 期刊稿件 › 文章 › 同行评审

摘要

Technological problems for realization of Micro Electro-mechanical System (MEMS) are discussed and an introduction of smart materials (PZT) is encouraged. The deposition and micromachining technology are discussed in integration of PZT thin films into MEMS. Further developments are proposed on PZT micro sensors and actuators with special emphasis laid on exploration of new application fields of MEMS, such as high density data storage system, micro optical processor and micro bio-chemical chip.

源语言	英语
页（从-至）	1-5
页数	5
期刊	Kikai Gijutsu Kenkyusho Shoho/Journal of Mechanical Engineering Laboratory
卷	52
期	2
出版状态	已出版 - 3月 1998

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引用此

@article{80c189c6039d4cec894965dc34d262eb,

title = "Solid state transducers for Micro System with ferroelectric Pb(Zr,Ti)O 3 thin films",

abstract = "Technological problems for realization of Micro Electro-mechanical System (MEMS) are discussed and an introduction of smart materials (PZT) is encouraged. The deposition and micromachining technology are discussed in integration of PZT thin films into MEMS. Further developments are proposed on PZT micro sensors and actuators with special emphasis laid on exploration of new application fields of MEMS, such as high density data storage system, micro optical processor and micro bio-chemical chip.",

keywords = "AFM, Actuator, FEM, Jet Printing, Membrane, Micro pump, PZT, Piezoelectric, Scanner, Thin layer",

author = "Ryutaro Maeda and Andreas Schroth and Chengkuo Lee and Jun Akedo",

year = "1998",

month = mar,

language = "英语",

volume = "52",

pages = "1--5",

journal = "Kikai Gijutsu Kenkyusho Shoho/Journal of Mechanical Engineering Laboratory",

issn = "0388-4252",

publisher = "Agency of Industrial Science and Technology",

number = "2",

}

TY - JOUR

T1 - Solid state transducers for Micro System with ferroelectric Pb(Zr,Ti)O 3 thin films

AU - Maeda, Ryutaro

AU - Schroth, Andreas

AU - Lee, Chengkuo

AU - Akedo, Jun

PY - 1998/3

Y1 - 1998/3

N2 - Technological problems for realization of Micro Electro-mechanical System (MEMS) are discussed and an introduction of smart materials (PZT) is encouraged. The deposition and micromachining technology are discussed in integration of PZT thin films into MEMS. Further developments are proposed on PZT micro sensors and actuators with special emphasis laid on exploration of new application fields of MEMS, such as high density data storage system, micro optical processor and micro bio-chemical chip.

AB - Technological problems for realization of Micro Electro-mechanical System (MEMS) are discussed and an introduction of smart materials (PZT) is encouraged. The deposition and micromachining technology are discussed in integration of PZT thin films into MEMS. Further developments are proposed on PZT micro sensors and actuators with special emphasis laid on exploration of new application fields of MEMS, such as high density data storage system, micro optical processor and micro bio-chemical chip.

KW - AFM

KW - Actuator

KW - FEM

KW - Jet Printing

KW - Membrane

KW - Micro pump

KW - PZT

KW - Piezoelectric

KW - Scanner

KW - Thin layer

UR - https://www.scopus.com/pages/publications/11544302796

M3 - 文章

AN - SCOPUS:11544302796

SN - 0388-4252

VL - 52

SP - 1

EP - 5

JO - Kikai Gijutsu Kenkyusho Shoho/Journal of Mechanical Engineering Laboratory

JF - Kikai Gijutsu Kenkyusho Shoho/Journal of Mechanical Engineering Laboratory

IS - 2

ER -

Solid state transducers for Micro System with ferroelectric Pb(Zr,Ti)O 3 thin films

摘要

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Solid state transducers for Micro System with ferroelectric Pb(Zr,Ti)O ₃ thin films