Smart optical microscanner with piezoelectric resonator, sensor, and tuner using Pb (Zr,Ti) O3 thin film

The present study describes the design, fabrication, and demonstration of the optical microscanner with a piezoelectric resonator, sensor, and tuner: a smart optical microscanner. Pb (Zr,Ti) O3 thin film is deposited not only on the resonators but also on the hinges to act as the sensor or tuner. dc voltage applied to the tuner has shifted the resonant frequency and the sensor has successfully detected the shift of the resonant frequency. Though the frequency shift is only 1 HzV and the signal from the sensor is noisy, the results indicate the potential of the smart optical microscanner.