TY - JOUR
T1 - Single-pulse lithography of amorphous photonic architectures inside all-inorganic dielectric crystals
AU - Wang, Zhuo
AU - Ma, Rongze
AU - Lin, Han
AU - Zhang, Pengfei
AU - Lu, Yu
AU - Chen, Feng
AU - Jia, Baohua
AU - Zhang, Bo
AU - Qiu, Jianrong
N1 - Publisher Copyright:
© The Author(s) 2026.
PY - 2026/12
Y1 - 2026/12
N2 - High-efficiency light modulation within transparent substrates is critically important for advancing in-chip integrated optical technologies. However, current micro/nanophotonic platforms primarily rely on 2D surface configurations, rendering them inadequate for 3D optical design in dielectric environments. Here, we introduce a precise phase-transition technique that enables the direct lithography of highly regular amorphous units in multiple transparent dielectric crystals (lithium niobates, quartz, yttrium vanadate, etc.). This unit can be rapidly written with a single ultrafast laser pulse, exhibiting a high-purity amorphization phase transition interior structure and a regular sheet-like anisotropic spatial morphology (aspect ratio reaching 190:1). We reveal that this amorphization stems from ultrafast laser-driven anisotropic thermal deposition, achieved through the synergy of the light-induced high-density free electrons and thermal effects. Such embedded units achieve more than an order of magnitude improvement in the efficiency of nonlinear beam shaping (~3% second harmonic and ~0.1% third harmonic) and offer multiple degrees of freedom for device design. This study establishes a versatile platform for on-demand production of all-dielectric micro/nanophotonic architectures in the free space of transparent dielectrics, unlocking new avenues for 3D integrated photonics.
AB - High-efficiency light modulation within transparent substrates is critically important for advancing in-chip integrated optical technologies. However, current micro/nanophotonic platforms primarily rely on 2D surface configurations, rendering them inadequate for 3D optical design in dielectric environments. Here, we introduce a precise phase-transition technique that enables the direct lithography of highly regular amorphous units in multiple transparent dielectric crystals (lithium niobates, quartz, yttrium vanadate, etc.). This unit can be rapidly written with a single ultrafast laser pulse, exhibiting a high-purity amorphization phase transition interior structure and a regular sheet-like anisotropic spatial morphology (aspect ratio reaching 190:1). We reveal that this amorphization stems from ultrafast laser-driven anisotropic thermal deposition, achieved through the synergy of the light-induced high-density free electrons and thermal effects. Such embedded units achieve more than an order of magnitude improvement in the efficiency of nonlinear beam shaping (~3% second harmonic and ~0.1% third harmonic) and offer multiple degrees of freedom for device design. This study establishes a versatile platform for on-demand production of all-dielectric micro/nanophotonic architectures in the free space of transparent dielectrics, unlocking new avenues for 3D integrated photonics.
UR - https://www.scopus.com/pages/publications/105033701463
U2 - 10.1038/s41377-026-02253-1
DO - 10.1038/s41377-026-02253-1
M3 - 文章
AN - SCOPUS:105033701463
SN - 2095-5545
VL - 15
JO - Light: Science and Applications
JF - Light: Science and Applications
IS - 1
M1 - 177
ER -