Simulation-based design of a MEMS X-ray optic for X-ray astronomy

M. Koshiishi; Y. Ezoe; I. Mitsuishi; M. Mita; K. Mitsuda; T. Takano; R. Maeda

doi:10.1109/OMEMS.2008.4607859

Simulation-based design of a MEMS X-ray optic for X-ray astronomy

M. Koshiishi
, Y. Ezoe
, I. Mitsuishi
, M. Mita
, K. Mitsuda
, T. Takano
, R. Maeda

Japan Aerospace Exploration Agency
Tokyo Metropolitan University
National Institute of Advanced Industrial Science and Technology

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

摘要

An ultra light-weight X-ray optic using MEMS technologies was designed for X-ray astronomy. Numerical simulation was utilized to estimate allowable fabrication accuracies. Obtained X-ray images with a fabricated optic were consistent with the design.

源语言	英语
主期刊名	2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS
页	122-123
页数	2
DOI	https://doi.org/10.1109/OMEMS.2008.4607859
出版状态	已出版 - 2008
已对外发布	是
活动	2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS - Freiburg, 德国期限: 11 8月 2008 → 14 8月 2008

出版系列

姓名	2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS

会议

会议	2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS
国家/地区	德国
市	Freiburg
时期	11/08/08 → 14/08/08

访问文件

10.1109/OMEMS.2008.4607859

其它文件与链接

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引用此

Koshiishi, M., Ezoe, Y., Mitsuishi, I., Mita, M., Mitsuda, K., Takano, T., & Maeda, R. (2008). Simulation-based design of a MEMS X-ray optic for X-ray astronomy. 在 2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS (页码 122-123). 文章 4607859 (2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS). https://doi.org/10.1109/OMEMS.2008.4607859

@inproceedings{e4991afa595549d8b6fe29b818812e40,

title = "Simulation-based design of a MEMS X-ray optic for X-ray astronomy",

abstract = "An ultra light-weight X-ray optic using MEMS technologies was designed for X-ray astronomy. Numerical simulation was utilized to estimate allowable fabrication accuracies. Obtained X-ray images with a fabricated optic were consistent with the design.",

author = "M. Koshiishi and Y. Ezoe and I. Mitsuishi and M. Mita and K. Mitsuda and T. Takano and R. Maeda",

year = "2008",

doi = "10.1109/OMEMS.2008.4607859",

language = "英语",

isbn = "9781424419180",

series = "2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS",

pages = "122--123",

booktitle = "2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS",

note = "2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS ; Conference date: 11-08-2008 Through 14-08-2008",

}

Koshiishi, M, Ezoe, Y, Mitsuishi, I, Mita, M, Mitsuda, K, Takano, T & Maeda, R 2008, Simulation-based design of a MEMS X-ray optic for X-ray astronomy. 在 2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS., 4607859, 2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS, 页码 122-123, 2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS, Freiburg, 德国, 11/08/08. https://doi.org/10.1109/OMEMS.2008.4607859

Simulation-based design of a MEMS X-ray optic for X-ray astronomy. / Koshiishi, M.; Ezoe, Y.; Mitsuishi, I. 等.
2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS. 2008. 页码 122-123 4607859 (2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS).

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

TY - GEN

T1 - Simulation-based design of a MEMS X-ray optic for X-ray astronomy

AU - Koshiishi, M.

AU - Ezoe, Y.

AU - Mitsuishi, I.

AU - Mita, M.

AU - Mitsuda, K.

AU - Takano, T.

AU - Maeda, R.

PY - 2008

Y1 - 2008

N2 - An ultra light-weight X-ray optic using MEMS technologies was designed for X-ray astronomy. Numerical simulation was utilized to estimate allowable fabrication accuracies. Obtained X-ray images with a fabricated optic were consistent with the design.

AB - An ultra light-weight X-ray optic using MEMS technologies was designed for X-ray astronomy. Numerical simulation was utilized to estimate allowable fabrication accuracies. Obtained X-ray images with a fabricated optic were consistent with the design.

UR - https://www.scopus.com/pages/publications/54049147852

U2 - 10.1109/OMEMS.2008.4607859

DO - 10.1109/OMEMS.2008.4607859

M3 - 会议稿件

AN - SCOPUS:54049147852

SN - 9781424419180

T3 - 2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS

SP - 122

EP - 123

BT - 2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS

T2 - 2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS

Y2 - 11 August 2008 through 14 August 2008

ER -

Koshiishi M, Ezoe Y, Mitsuishi I, Mita M, Mitsuda K, Takano T 等. Simulation-based design of a MEMS X-ray optic for X-ray astronomy. 在 2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS. 2008. 页码 122-123. 4607859. (2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS). doi: 10.1109/OMEMS.2008.4607859

Simulation-based design of a MEMS X-ray optic for X-ray astronomy

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