@inproceedings{ce44505830f34e5d8291e7258c927156,
title = "Sensitivity improvement of SAW pressure sensors based on finite element analysis",
abstract = "This paper evaluates the influence of the geometry design on the sensitivity of SAW (surface acoustic wave) pressure sensors. The SAW propagation characteristics on the pressurized ST-x quartz diaphragm are simulated through the finite element analysis. The pressure sensitivities for different sensor configurations are obtained by studying the resonance frequency over a wide range of the operating pressure. It is found that the estimated sensitivity is almost linear with the frequency and accordingly the pressure sensitivity can be improved effectively by increasing the resonance frequency of the SAW resonators. Meanwhile, the simulation results show that a higher sensitivity can be achieved by the proper design of the number of IDT fingers, and the selection of the resonator location.",
keywords = "SAW pressure sensor, ST-x quartz, finite element modeling, resonance frequency, sensitivity",
author = "Juan Ren and Kanat Anurakparadorn and Zhuangde Jiang and Xueyong Wei",
note = "Publisher Copyright: {\textcopyright} 2016 IEEE.; 70th IEEE International Frequency Control Symposium, IFCS 2016 ; Conference date: 09-05-2016 Through 12-05-2016",
year = "2016",
month = aug,
day = "16",
doi = "10.1109/FCS.2016.7546821",
language = "英语",
series = "2016 IEEE International Frequency Control Symposium, IFCS 2016 - Proceedings",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2016 IEEE International Frequency Control Symposium, IFCS 2016 - Proceedings",
}