Research on special piezoresistive acceleration sensor

Utilizing the dynamics analysis and finite element simulation, the acceleration sensor s mechanical structure with high overload protection capability was designed. The micro electro-mechanical system (MEMS) and integrated circuit technology were adopted to manufacture the solid piezoresistive silicon flat chip with high precision and sensitivity, and packaged on the concentrated stress location of an elastic beam by glass powder sintering, and the special piezoresistive acceleration sensor was developed with the measurement range of ±20 km/s² and the overload capability of 30 times full scale (FS) via laser welding. Under applying point load and dynamic shock to the sensor, the experiments show that the sensor achieves the index of static precision 0.86%FS and dynamic response frequency 3.434 kHz which can meet the requirements of the trigger control technology for the unconventional weapon.