TY - JOUR
T1 - Research of the high temperature pressure sensor technology
AU - Zhao, Yulong
AU - Zhao, Libo
AU - Jiang, Zhuangde
PY - 2002/12
Y1 - 2002/12
N2 - The high temperature pressure sensor based on the micro electromechanical system (MEMS) technology, which takes use of the high temperature SOI sensitive element and the girder-film combined design, is designed. It possesses the higher frequency response and is able to endure high and instantaneous ultrahigh temperature. The sensor is used in checking and measuring the pressure in the harsh environment beyond 0-220°C, and is able to endure 1000°C instantaneous impact. The structure model and testing data are supplied, and the results are satisfying.
AB - The high temperature pressure sensor based on the micro electromechanical system (MEMS) technology, which takes use of the high temperature SOI sensitive element and the girder-film combined design, is designed. It possesses the higher frequency response and is able to endure high and instantaneous ultrahigh temperature. The sensor is used in checking and measuring the pressure in the harsh environment beyond 0-220°C, and is able to endure 1000°C instantaneous impact. The structure model and testing data are supplied, and the results are satisfying.
KW - Girder-film combined design
KW - High temperature pressure sensor
KW - Instantaneous impact
UR - https://www.scopus.com/pages/publications/0141819339
U2 - 10.3901/jme.2002.supp.070
DO - 10.3901/jme.2002.supp.070
M3 - 文章
AN - SCOPUS:0141819339
SN - 0577-6686
VL - 38
SP - 70
EP - 72
JO - Jixie Gongcheng Xuebao/Chinese Journal of Mechanical Engineering
JF - Jixie Gongcheng Xuebao/Chinese Journal of Mechanical Engineering
IS - SUPPL.
ER -