Relaxation of a strained elastic film on a viscous layer

R. Huang; H. Yin; J. Liang; K. D. Hobart; J. C. Sturm; Z. Suo

Relaxation of a strained elastic film on a viscous layer

R. Huang
, H. Yin
, J. Liang
, K. D. Hobart
, J. C. Sturm
, Z. Suo

Princeton University
Naval Research Laboratory

科研成果: 期刊稿件 › 文章 › 同行评审

14 引用（Scopus）

摘要

Experiments were conducted with SiGe film islands on a layer of borophosphorosilicate glass (BSPG). Initially the SiGe is under compression. Upon annealing, the glass flows and the SiGe islands relax by both inplane expansion and wrinkling. This paper provides a two-dimensional (2D) model for inplane expansion. The results from the model are compared with the experiments with small SiGe islands. The effect of winkling, which is ignored in the present model, is discussed qualitatively.

源语言	英语
页（从-至）	115-120
页数	6
期刊	Materials Research Society Symposium - Proceedings
卷	695
出版状态	已出版 - 2002
已对外发布	是

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abstract = "Experiments were conducted with SiGe film islands on a layer of borophosphorosilicate glass (BSPG). Initially the SiGe is under compression. Upon annealing, the glass flows and the SiGe islands relax by both inplane expansion and wrinkling. This paper provides a two-dimensional (2D) model for inplane expansion. The results from the model are compared with the experiments with small SiGe islands. The effect of winkling, which is ignored in the present model, is discussed qualitatively.",

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T1 - Relaxation of a strained elastic film on a viscous layer

AU - Huang, R.

AU - Yin, H.

AU - Liang, J.

AU - Hobart, K. D.

AU - Sturm, J. C.

AU - Suo, Z.

PY - 2002

Y1 - 2002

N2 - Experiments were conducted with SiGe film islands on a layer of borophosphorosilicate glass (BSPG). Initially the SiGe is under compression. Upon annealing, the glass flows and the SiGe islands relax by both inplane expansion and wrinkling. This paper provides a two-dimensional (2D) model for inplane expansion. The results from the model are compared with the experiments with small SiGe islands. The effect of winkling, which is ignored in the present model, is discussed qualitatively.

AB - Experiments were conducted with SiGe film islands on a layer of borophosphorosilicate glass (BSPG). Initially the SiGe is under compression. Upon annealing, the glass flows and the SiGe islands relax by both inplane expansion and wrinkling. This paper provides a two-dimensional (2D) model for inplane expansion. The results from the model are compared with the experiments with small SiGe islands. The effect of winkling, which is ignored in the present model, is discussed qualitatively.

UR - https://www.scopus.com/pages/publications/0036350003

M3 - 文章

AN - SCOPUS:0036350003

SN - 0272-9172

VL - 695

SP - 115

EP - 120

JO - Materials Research Society Symposium - Proceedings

JF - Materials Research Society Symposium - Proceedings

ER -

Relaxation of a strained elastic film on a viscous layer

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