Relation between properties of PbLaTiO₃ ferroelectric thin films and thermal annealing processes

Morphologies, dielectric and ferroelectric properties, current-voltage (I-V) and capacitance-voltage (C-V) characteristics of lead lanthanum titanate thin films were compared under different annealing conditions. They were annealed by rapid thermal annealing process (RTA), conventional furnace annealing process (CFA) and thermal annealing process of combination of RTA with CFA (RCA). The features of each thermal annealing process were discussed. The results show that the films annealed by RCA process have larger grain size and remnant polarization. The I-V dependence deviated from Ohm's law, C-V curve shows sharper nonlinearity peaks.