Properties of lead lanthanum titanate ferroelectric thin films by rapid thermal annealing

Properties of lead lanthanum titanate ferroelectric thin films by rapid thermaal annealing at various temperatures were investigated. The grain sizes of the films are about 20 nm from 500 - 850 °C. The remanent polarization Pr and the coercive field Ec of typical sampels are about 5.3 μ C/cm² and 102KV/cm, respectively. The dielectric constant is about 370, the dielectric loss tangent is less than 2% at 1KHz. Furthermore, grain sizes, morphologies, dielectric and ferroelectric properties of the thin films annealed by rapid thermal annealing (RTA) process, conventional furnace annealing (CFA) process and thermal annealing process of combination of RTA with CFA were compared.