TY - GEN
T1 - Preparation of TiN films on AZ91C by cathode multi arc ion and its performance
AU - Duowang, Fan
AU - Chenglong, Wang
AU - Lingxiao, Ming
AU - Lin, Zhao
AU - Hongzhong, Liu
PY - 2007
Y1 - 2007
N2 - TiN films growing, Ti films as interlayers were prepared on AZ91C by CMP equipment. Surface topography, microstructure and hardness of the films were analyzed with high resolution SEM, X-ray EDS and CSM microcharacter hardness tester.
AB - TiN films growing, Ti films as interlayers were prepared on AZ91C by CMP equipment. Surface topography, microstructure and hardness of the films were analyzed with high resolution SEM, X-ray EDS and CSM microcharacter hardness tester.
UR - https://www.scopus.com/pages/publications/47849110571
U2 - 10.1109/INOW.2007.4302883
DO - 10.1109/INOW.2007.4302883
M3 - 会议稿件
AN - SCOPUS:47849110571
SN - 1424415918
SN - 9781424415915
T3 - 2007 International Nano-Optelectronics Workshop, iNOW
SP - 70
EP - 71
BT - 2007 International Nano-Optelectronics Workshop, iNOW
T2 - International Nano-Optoelectronic Workshop, iNOW
Y2 - 29 July 2007 through 11 August 2007
ER -