Precision metrology of micro-workpieces on their tribological performance with an error compensation method

A test system with a new compensation method is introduced to precisely evaluate the tribological performance of the micro-machining of workpieces under a load of mill-Newton scale. Since the tribological force is faint in micro-scale, the tested result is influenced significantly by the testing error. The new metrology method to precisely evaluate the friction coefficient of micro-bearings is developed by means of error compensation from two sets of testing data. The data are, respectively, collected when the friction counterparts rotate clockwise and counter-clockwise. Because the friction coefficient is deduced from the measuring force data, this method enhances the metrological precision of the friction coefficient theoretically due to the counteracting of the error values in the equation.