@inproceedings{096cc06e7d484c05960fd2bab43638ad,
title = "Piezoresistive micro-accelerometer with supplement structure",
abstract = "In order to establish optimal structure for micro vibration due to electric spark occurs in the faulty cable. A novel acceleration sensing with supplement beams structure utilizing the piezoresistive principle is presented and compared with traditional structures. The mechanical model and its simulation solution are built up and carried on, including the calculation of the sensitivity and frequency behavior of several sensor structures. The sensor is built up as an sense beam and supplement beam is supposed to have high sensitivity, higher resonant frequency and minimized lateral effect. For the designed sensor structure, the formula of stress, natural frequency and damping was derived in theory, and the optimized structure is confirmed through adjust the beams size.",
keywords = "MEMS, accelerometer, spindle, vibration detection",
author = "Bian Tian and Peng Wang and Yulong Zhao and Zhuangde Jiang and Bo Shen",
note = "Publisher Copyright: {\textcopyright} 2015 IEEE.; 10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015 ; Conference date: 07-04-2015 Through 11-04-2015",
year = "2015",
month = jul,
day = "1",
doi = "10.1109/NEMS.2015.7147385",
language = "英语",
series = "2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "107--110",
booktitle = "2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015",
}