摘要
Piezopolymer PVDF and P(VDF-TrFE) based diaphragms were fabricated. The diaphragm can be used as a high performance sensor platform for using in liquid. The microelectronic process for fabricating microdiaphragm and its array has been established. The performance of the PVDF based diaphragm in air and liquid was tested. It is found that the diaphragm works well in liquid.
| 源语言 | 英语 |
|---|---|
| 主期刊名 | Materials Research Society Symposium Proceedings |
| 页 | 57-62 |
| 页数 | 6 |
| 出版状态 | 已出版 - 2006 |
| 活动 | 2005 Materials Research Society Fall Meeting - Boston, MA, 美国 期限: 28 11月 2005 → 1 12月 2005 |
出版系列
| 姓名 | Materials Research Society Symposium Proceedings |
|---|---|
| 卷 | 889 |
| ISSN(印刷版) | 0272-9172 |
会议
| 会议 | 2005 Materials Research Society Fall Meeting |
|---|---|
| 国家/地区 | 美国 |
| 市 | Boston, MA |
| 时期 | 28/11/05 → 1/12/05 |
学术指纹
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