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Piezopolymer diaphragm as high performance biosensor platform

  • Zhimin Li
  • , Suiqiong Li
  • , Zhuo Xu
  • , Z. Y. Cheng
  • Auburn University

科研成果: 书/报告/会议事项章节会议稿件同行评审

3 引用 (Scopus)

摘要

Piezopolymer PVDF and P(VDF-TrFE) based diaphragms were fabricated. The diaphragm can be used as a high performance sensor platform for using in liquid. The microelectronic process for fabricating microdiaphragm and its array has been established. The performance of the PVDF based diaphragm in air and liquid was tested. It is found that the diaphragm works well in liquid.

源语言英语
主期刊名Materials Research Society Symposium Proceedings
57-62
页数6
出版状态已出版 - 2006
活动2005 Materials Research Society Fall Meeting - Boston, MA, 美国
期限: 28 11月 20051 12月 2005

出版系列

姓名Materials Research Society Symposium Proceedings
889
ISSN(印刷版)0272-9172

会议

会议2005 Materials Research Society Fall Meeting
国家/地区美国
Boston, MA
时期28/11/051/12/05

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