Phase structure of ZnS bulk material prepared by chemical vapor deposition

Infrared crystal ZnS bulk materials were prepared by chemical vapor deposition. The phase structure of ZnS was analysed with XRD and TEM. The infrared transmittance was measured using IR. The results show that the phase structure of ZnS deposited at 550 °C to 700 °C and H₂S/Zn mole flow ratio 0.5-20 is mainly sphalerite. There exist a few wurtzite structures with a layer morphology in ZnS. Increasing deposition temperature and H₂S/Zn mole flow ratio, the content of wurtzite structure tends to increase which decreases the infrared transmittance of ZnS. The formation of the wurtzite structure is also related to partial pressure of sulphur in deposition atmosphere.