Performance improvement of β-Ga₂O₃ SBD-based rectifier with embedded microchannels in ceramic substrate

This study proposed and fabricated a β-Ga₂O₃ SBD-based rectifier with embedded microchannels in a ceramic substrate for active cooling for the first time. Experimental results demonstrate that this technique can increase the output power from 3.2 to 21.3 W, consuming only 0.9 mW of pump power. The achievements in this work indicate that embedded cooling offers a powerful technique to suppress the thermal effects on Ga₂O₃ devices and circuits, thereby improving their electrical performance.