TY - JOUR
T1 - Parameter Optimization of Semiconductor Gas Sensor under AC Impedance Measurement
AU - Chu, Jifeng
AU - Deng, Zhuoli
AU - Pan, Jianbin
AU - Yang, Aijun
AU - Wang, Qiongyuan
AU - Yuan, Hongye
AU - Yuan, Huan
AU - Xin, Feng
AU - Rong, Mingzhe
AU - Wang, Xiaohua
N1 - Publisher Copyright:
© 2024 American Chemical Society.
PY - 2024/10/25
Y1 - 2024/10/25
N2 - Semiconductor gas sensors were confirmed to perform high linearity and a stable baseline under alternating current (AC) impedance measurements. However, a procedure to determine the optimal parameters of AC impedance measurements is still lacking. Taking the detection of SF6 decomposition gas as an example, this work has established a model of semiconductor gas sensors under AC impedance measurement. Employing four types of sensors to detect three gases (H2S, SO2, and CO), the effectiveness of the optimization method has been validated, as well. With the high linearity and stable baseline obtained from AC impedance measurement, it enables rapid correction of temperature drift within environmental temperatures ranging from 10 to 30 °C. Overall, the proposed method can provide a novel approach to inhibit the drift failure of semiconductor gas sensors.
AB - Semiconductor gas sensors were confirmed to perform high linearity and a stable baseline under alternating current (AC) impedance measurements. However, a procedure to determine the optimal parameters of AC impedance measurements is still lacking. Taking the detection of SF6 decomposition gas as an example, this work has established a model of semiconductor gas sensors under AC impedance measurement. Employing four types of sensors to detect three gases (H2S, SO2, and CO), the effectiveness of the optimization method has been validated, as well. With the high linearity and stable baseline obtained from AC impedance measurement, it enables rapid correction of temperature drift within environmental temperatures ranging from 10 to 30 °C. Overall, the proposed method can provide a novel approach to inhibit the drift failure of semiconductor gas sensors.
KW - SF decomposition products
KW - drift correction
KW - gas sensor
KW - impedance measurements
KW - linearity improvement
KW - parameter optimization
UR - https://www.scopus.com/pages/publications/85207665436
U2 - 10.1021/acssensors.4c01903
DO - 10.1021/acssensors.4c01903
M3 - 文章
C2 - 39413027
AN - SCOPUS:85207665436
SN - 2379-3694
VL - 9
SP - 5561
EP - 5569
JO - ACS Sensors
JF - ACS Sensors
IS - 10
ER -