Optimized synchronization efficiency in micromechanical arch beams

Synchronization phenomena in MEMS devices are extensively studied due to their critical applications and intricate dynamics. Nevertheless, research on synchronization time – key to sensor performance – remains sparse. Current optimization efforts are predominantly focused on device fabrication and signal transmission, while dynamics approaches are limited to perfected straight beams, which can deviate in practical applications. In this study, we explore the dynamics of synchronization in a clamped–clamped micromechanical arch beam, modulated by electrothermal currents. Initially, we employed electrothermal currents to achieve an optimal synchronization time. Our theoretical analysis demonstrated that reducing equivalent nonlinearity leads to a shorter synchronization time. This effect was experimentally verified by manipulating the static DC voltage in electrostatic excitation to control the nonlinearity. By combining electrothermal current regulation and nonlinearity control, we substantially reduced synchronization time by 84%, from 1.170 s to 0.182 s. These results introduce a novel strategy for enhancing the detection efficiency of synchronization sensors, with broad implications for sensor technology.