Numerical simulations of multimode interference accelerometer based on polyimide

A multimode interference accelerometer making use of the self-imaging effect in a melt mode polymer waveguide is proposed and the performance of the accelerometer is simulated. The field excitation efficient changes with the relative displacement between the input/output light filed and the interference area to determine the intensity of the output filed and obtain the acceleration. The expected cantilever defection profiles of the accelerometer are simulated and analyzed with finite element modeling (FEM), and the transmission of the multimode interference is then simulated with the beam propagation method (BPM).