Novel ultra-lightweight and High-resolution MEMS X-ray optics for space astronomy

I. Mitsuishi; Y. Ezoe; K. Ishizu; T. Moriyama; M. Mita; N. Y. Yamasaki; K. Mitsuda; M. Horade; S. Sugiyama; R. Riveros; H. Yamaguchi; Y. Kanamori; K. Morishita; K. Nakajima; R. Maeda

doi:10.1109/TRANSDUCERS.2011.5969715

Novel ultra-lightweight and High-resolution MEMS X-ray optics for space astronomy

I. Mitsuishi
, Y. Ezoe
, K. Ishizu
, T. Moriyama
, M. Mita
, N. Y. Yamasaki
, K. Mitsuda
, M. Horade
, S. Sugiyama
, R. Riveros
, H. Yamaguchi
, Y. Kanamori
, K. Morishita
, K. Nakajima
, R. Maeda

ISAS/JAXA
Tokyo Metropolitan University
Ritsumeikan University
University of Florida
Tohoku University
Kyoto University
National Institute of Advanced Industrial Science and Technology

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

5 引用（Scopus）

摘要

We report a novel micromachined X-ray optics using DRIE formed micro mirrors for future space astronomical missions. We have fabricated a test optics and measured its imaging quality using X-rays. We have successfully verified the X-ray focusing using this type of optics for the first time in the world. The obtained angular resolution was about 20 arcmin and 3.1 mm. This result was consistent with the expected angular resolution based on the surface roughness of the DRIE formed side walls. To achieve a better angular resolution, we will condition annealing and magnetic field assisted finishing processes.

源语言	英语
主期刊名	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
出版商	IEEE Computer Society
页	566-569
页数	4
ISBN（印刷版）	9781457701573
DOI	https://doi.org/10.1109/TRANSDUCERS.2011.5969715
出版状态	已出版 - 2011
已对外发布	是

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姓名	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

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10.1109/TRANSDUCERS.2011.5969715

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Mitsuishi, I., Ezoe, Y., Ishizu, K., Moriyama, T., Mita, M., Yamasaki, N. Y., Mitsuda, K., Horade, M., Sugiyama, S., Riveros, R., Yamaguchi, H., Kanamori, Y., Morishita, K., Nakajima, K., & Maeda, R. (2011). Novel ultra-lightweight and High-resolution MEMS X-ray optics for space astronomy. 在 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 (页码 566-569). 文章 5969715 (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11). IEEE Computer Society. https://doi.org/10.1109/TRANSDUCERS.2011.5969715

Mitsuishi, I. ; Ezoe, Y. ; Ishizu, K. 等. / Novel ultra-lightweight and High-resolution MEMS X-ray optics for space astronomy. 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11. IEEE Computer Society, 2011. 页码 566-569 (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11).

@inproceedings{b2486c57211d49c8b5f4812f3d810e97,

title = "Novel ultra-lightweight and High-resolution MEMS X-ray optics for space astronomy",

abstract = "We report a novel micromachined X-ray optics using DRIE formed micro mirrors for future space astronomical missions. We have fabricated a test optics and measured its imaging quality using X-rays. We have successfully verified the X-ray focusing using this type of optics for the first time in the world. The obtained angular resolution was about 20 arcmin and 3.1 mm. This result was consistent with the expected angular resolution based on the surface roughness of the DRIE formed side walls. To achieve a better angular resolution, we will condition annealing and magnetic field assisted finishing processes.",

keywords = "MEMS, X-ray, optics, space astronomy",

author = "I. Mitsuishi and Y. Ezoe and K. Ishizu and T. Moriyama and M. Mita and Yamasaki, \{N. Y.\} and K. Mitsuda and M. Horade and S. Sugiyama and R. Riveros and H. Yamaguchi and Y. Kanamori and K. Morishita and K. Nakajima and R. Maeda",

year = "2011",

doi = "10.1109/TRANSDUCERS.2011.5969715",

language = "英语",

isbn = "9781457701573",

series = "2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11",

publisher = "IEEE Computer Society",

pages = "566--569",

booktitle = "2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11",

}

Mitsuishi, I, Ezoe, Y, Ishizu, K, Moriyama, T, Mita, M, Yamasaki, NY, Mitsuda, K, Horade, M, Sugiyama, S, Riveros, R, Yamaguchi, H, Kanamori, Y, Morishita, K, Nakajima, K & Maeda, R 2011, Novel ultra-lightweight and High-resolution MEMS X-ray optics for space astronomy. 在 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11., 5969715, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, IEEE Computer Society, 页码 566-569. https://doi.org/10.1109/TRANSDUCERS.2011.5969715

Novel ultra-lightweight and High-resolution MEMS X-ray optics for space astronomy. / Mitsuishi, I.; Ezoe, Y.; Ishizu, K. 等.
2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11. IEEE Computer Society, 2011. 页码 566-569 5969715 (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11).

科研成果: 书/报告/会议事项章节 › 会议稿件 › 同行评审

TY - GEN

T1 - Novel ultra-lightweight and High-resolution MEMS X-ray optics for space astronomy

AU - Mitsuishi, I.

AU - Ezoe, Y.

AU - Ishizu, K.

AU - Moriyama, T.

AU - Mita, M.

AU - Yamasaki, N. Y.

AU - Mitsuda, K.

AU - Horade, M.

AU - Sugiyama, S.

AU - Riveros, R.

AU - Yamaguchi, H.

AU - Kanamori, Y.

AU - Morishita, K.

AU - Nakajima, K.

AU - Maeda, R.

PY - 2011

Y1 - 2011

N2 - We report a novel micromachined X-ray optics using DRIE formed micro mirrors for future space astronomical missions. We have fabricated a test optics and measured its imaging quality using X-rays. We have successfully verified the X-ray focusing using this type of optics for the first time in the world. The obtained angular resolution was about 20 arcmin and 3.1 mm. This result was consistent with the expected angular resolution based on the surface roughness of the DRIE formed side walls. To achieve a better angular resolution, we will condition annealing and magnetic field assisted finishing processes.

AB - We report a novel micromachined X-ray optics using DRIE formed micro mirrors for future space astronomical missions. We have fabricated a test optics and measured its imaging quality using X-rays. We have successfully verified the X-ray focusing using this type of optics for the first time in the world. The obtained angular resolution was about 20 arcmin and 3.1 mm. This result was consistent with the expected angular resolution based on the surface roughness of the DRIE formed side walls. To achieve a better angular resolution, we will condition annealing and magnetic field assisted finishing processes.

KW - MEMS

KW - X-ray

KW - optics

KW - space astronomy

UR - https://www.scopus.com/pages/publications/80052108648

U2 - 10.1109/TRANSDUCERS.2011.5969715

DO - 10.1109/TRANSDUCERS.2011.5969715

M3 - 会议稿件

AN - SCOPUS:80052108648

SN - 9781457701573

T3 - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

SP - 566

EP - 569

BT - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

PB - IEEE Computer Society

ER -

Mitsuishi I, Ezoe Y, Ishizu K, Moriyama T, Mita M, Yamasaki NY 等. Novel ultra-lightweight and High-resolution MEMS X-ray optics for space astronomy. 在 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11. IEEE Computer Society. 2011. 页码 566-569. 5969715. (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11). doi: 10.1109/TRANSDUCERS.2011.5969715

Novel ultra-lightweight and High-resolution MEMS X-ray optics for space astronomy

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