Novel multibridge-structured piezoelectric microdevice for scanning force microscopy

J. Chu; Z. Wang; R. Maeda; K. Kataoka; T. Itoh; T. Suga

doi:10.1116/1.1319684

Novel multibridge-structured piezoelectric microdevice for scanning force microscopy

J. Chu
, Z. Wang
, R. Maeda
, K. Kataoka
, T. Itoh
, T. Suga

National Institute of Advanced Industrial Science and Technology
University of Science and Technology of China

科研成果: 期刊稿件 › 会议文章 › 同行评审

54 引用（Scopus）

摘要

The structure and microfabrication method of a multibridged structured piezoelectric microdevice used for scanning tunneling microscopy (SPM) are described. The device is a lead zirconate titanate (PZT) bimorph structure in the shape of a cantilever supported by bridges. The eigenfrequency was effectively increased by the multibridged structure which was important for improving the SPM data rate.

源语言	英语
页（从-至）	3604-3607
页数	4
期刊	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
卷	18
期	6
DOI	https://doi.org/10.1116/1.1319684
出版状态	已出版 - 11月 2000
已对外发布	是
活动	44th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication - Rancho Mirage, CA, USA 期限: 30 5月 2000 → 2 6月 2000

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abstract = "The structure and microfabrication method of a multibridged structured piezoelectric microdevice used for scanning tunneling microscopy (SPM) are described. The device is a lead zirconate titanate (PZT) bimorph structure in the shape of a cantilever supported by bridges. The eigenfrequency was effectively increased by the multibridged structure which was important for improving the SPM data rate.",

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T1 - Novel multibridge-structured piezoelectric microdevice for scanning force microscopy

AU - Chu, J.

AU - Wang, Z.

AU - Maeda, R.

AU - Kataoka, K.

AU - Itoh, T.

AU - Suga, T.

PY - 2000/11

Y1 - 2000/11

N2 - The structure and microfabrication method of a multibridged structured piezoelectric microdevice used for scanning tunneling microscopy (SPM) are described. The device is a lead zirconate titanate (PZT) bimorph structure in the shape of a cantilever supported by bridges. The eigenfrequency was effectively increased by the multibridged structure which was important for improving the SPM data rate.

AB - The structure and microfabrication method of a multibridged structured piezoelectric microdevice used for scanning tunneling microscopy (SPM) are described. The device is a lead zirconate titanate (PZT) bimorph structure in the shape of a cantilever supported by bridges. The eigenfrequency was effectively increased by the multibridged structure which was important for improving the SPM data rate.

UR - https://www.scopus.com/pages/publications/0034317719

U2 - 10.1116/1.1319684

DO - 10.1116/1.1319684

M3 - 会议文章

AN - SCOPUS:0034317719

SN - 1071-1023

VL - 18

SP - 3604

EP - 3607

JO - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

JF - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

IS - 6

T2 - 44th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication

Y2 - 30 May 2000 through 2 June 2000

ER -

Novel multibridge-structured piezoelectric microdevice for scanning force microscopy

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