TY - JOUR
T1 - Nonlinear dynamics study based on uncertainty analysis in electro-thermal excited MEMS resonant sensor
AU - Shi, Huichao
AU - Fan, Shangchun
AU - Zhang, Yuwen
AU - Sun, Jinhao
N1 - Publisher Copyright:
© 2015 Elsevier B.V.
PY - 2015/7/10
Y1 - 2015/7/10
N2 - Abstract Nonlinear vibration model of double-clamped resonant beam driven by electro-thermal excitation in a MEMS resonant pressure sensor is established. Inherent heat elevation of electro-thermal excitation is taken into account besides the nonlinear geometric effect. An approximate solution for this model is obtained via Galérkin procedure and multiple scales method. The sample-based stochastic model is established to investigate the influence of inherent heat elevation on vibrating nonlinearity, including linear natural frequency frn, nonlinear frequency offset Foff, resonator amplitude Amp, and the non-linear factor Fnol, considering uncertainty distributions of structure size and excitation voltage due to fabricating or control errors. The results reveal that the dc bias of the excitation signal has significant effect on vibrating nonlinearity, which is verified by experiments. The results can be used as reference for sensor design and operation with respect to proposed nonlinear effects.
AB - Abstract Nonlinear vibration model of double-clamped resonant beam driven by electro-thermal excitation in a MEMS resonant pressure sensor is established. Inherent heat elevation of electro-thermal excitation is taken into account besides the nonlinear geometric effect. An approximate solution for this model is obtained via Galérkin procedure and multiple scales method. The sample-based stochastic model is established to investigate the influence of inherent heat elevation on vibrating nonlinearity, including linear natural frequency frn, nonlinear frequency offset Foff, resonator amplitude Amp, and the non-linear factor Fnol, considering uncertainty distributions of structure size and excitation voltage due to fabricating or control errors. The results reveal that the dc bias of the excitation signal has significant effect on vibrating nonlinearity, which is verified by experiments. The results can be used as reference for sensor design and operation with respect to proposed nonlinear effects.
KW - Double-clamped resonant beam
KW - MEMS resonant sensor
KW - Nonlinear vibration
KW - Sample-based stochastic model
KW - Uncertainty
UR - https://www.scopus.com/pages/publications/84936745970
U2 - 10.1016/j.sna.2015.05.016
DO - 10.1016/j.sna.2015.05.016
M3 - 文献综述
AN - SCOPUS:84936745970
SN - 0924-4247
VL - 232
SP - 103
EP - 114
JO - Sensors and Actuators A: Physical
JF - Sensors and Actuators A: Physical
M1 - 9188
ER -