摘要
Stressed lap, compared to traditional polishing methods, has high processing efficiency. However, this method has disadvantages in processing nonsymmetric surface errors. A basic-function method is proposed to calculate parameters for a stressed-lap polishing system. It aims to minimize residual errors and is based on a matrix and nonlinear optimization algorithm. The results show that residual root-mean-square could be < 15% after one process for classical trefoil error. The surface period errors close to the lap diameter were removed efficiently, up to 50% material removal.
| 源语言 | 英语 |
|---|---|
| 文章编号 | 055101 |
| 期刊 | Optical Engineering |
| 卷 | 55 |
| 期 | 5 |
| DOI | |
| 出版状态 | 已出版 - 1 5月 2016 |
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